IE1000A IP66-rated, Multi-gas, Multi-range, Elastomer-sealed, Mass Flow Controller for Flow Rates from 500 to 1000 slm

More about the IE1000A here

Full Scale Flow Range 501 - 1000 slm
(N2 equivalent)
Maximum Inlet Pressure 150 psig
(cannot exceed pressure differential requirement across MFC)
Normal Operating Pressure Differential 40 to 50 psid
(dependent on fitting type)
(with atmospheric pressure at the MFC outlet)
Burst Pressure 1500 psig
Control Range 2% to 100% of Full Scale (range on mech.)
Typical Accuracy ±1% of set point for >20% to 100% Full Scale
± 0.25% of Full Scale for 5% to 20% Full Scale
Repeatability ± 0.5% of Reading
Resolution 0.1% of Full Scale
Temperature Coefficients
Zero <0.05% of Full Scale/°C
Span <0.08% of Rdg./°C
Inlet Pressure Coefficient <0.08% of Reading/psi
Typical Controller Settling Time <3 sec typical above 10% Full Scale @ 50 psi
Warm-up Time one (1) hour
Operating Temperature Range 10°C to 50°C (Ambient)
Storage Humidity 0 to 95% Relative Humidity, non-condensing
Storage Temperature -20° to 65°C (-4° to 149° F)
Fittings Compatible with:
Swagelok 8 VCR male, 8 VCO® male, 1/2 inch tube compression, 12 mm compression, 3/4 inch tube compression, 1/2 inch NPT female, 3/4 inch NPT female, Swagelok 12 VCR® male, 12 VCO® male
Leak Integrity
External <1 x 10-9 (scc/sec He)
Through closed valve <1.0% Full Scale at 40 psia to vac (<500 mTorr)
(To assure no flow-through, a separate positive shut-off valve is required.)
Wetted Materials 316 S.S., Elgiloy, 430FR, PTFE (Standard)
Seal Options Viton® (Class VI), EPDM (Class VI)
Surface Finish 16 µinch average Ra
Weight Less than 12.7 lbs. (5.8 kg)
Enclosure Rating IP66
Compliance CE
Input Power Required +15 to +24 VDC @ (<8 watts)
Flow Input/Output Signal
Voltage (0 to 5 VDC) 15-pin Type "D" male
Current (4 to 20 mA) 15-pin Type "D" male

Specifications are subject to change without notice.
VCR® is a registered trademark of Swagelok® Company.
VCR® and VCO® are registered trademarks of Swagelok Marketing Co., Solon, OH.
Viton® is a registered trademark of E.I. Dupont Company, Wilmington, DE.
Elgiloy® is a registered trademark of Elgiloy Specialty Metals, Elgin, IL.
Copyright MKS Instruments, Inc. unless noted otherwise.

Need help?

Contact an Applications Specialist by sending an email to MKS Instruments, or call 978-645-5500.