Frequently Asked Questions from MKS Instruments

What are the different types of fittings are available on stainless steel piping products?

What are the various types of gauges available from MKS Instruments?

What are the different heater types available from MKS Products?

What are the various types of valves available from MKS Products?

Which semiconductor processes benefit from heated pumping lines, and which critical parts should be heated?

Are standard heated parts available, or does each piece require custom design?

What is the most important advantage to a heated process line?

How do I rebuild a Series 421 cold cathode sensor?

How do I rebuild an I-Mag 423 cold cathode sensor?

How do I convert units of mbar, Torr and Pascal?

Which semiconductor processes benefit from heated pumping lines, and which critical parts should be heated?

LPCVD, TEOS and metal etch processes benefit from heated pumping lines. Heated valves generate fewer particles, and heated gauges that measure process pressures improve process repeatability.

Learn more about MKS Heated lines and traps.

Are standard heated parts available?

The MKS Vacuum Products Group offers off-the-shelf heater jackets for many standard components. Heaters are available for parts such as straight sections, elbows, tees, and some valves in the NW 40, NW 50, NW 80, and NW 100 sizes. Standard heaters are available for the HPS� Jalapeno line of single and multiple stage poppet valves and the MKS line of throttle valves.

Learn more about MKS Heated lines and traps.

What is the most important advantage to a heated process line?

Increased product yield and reduced downtime! A heated component can substantially reduce the amount of particulate in a system. An accumulation of particulate can limit the system's conductance, thus reducing the efficiency of the pump, or it can contaminate the process both upstream and downstream. Frequent maintenance and system downtime can be reduced with heated components, thus saving both time and money.

Learn more about MKS Heated lines and traps.

Need help?

Contact an Applications Specialist by sending an email to MKS Instruments, or call 303-449-9861.