HPQ3/HPQ3S High Pressure RGA

Learn more about the HPQ3 here and the HPQ3S here.

Mass Range 1-100 amu
Detector Faraday
Filaments Twin Tungsten or Thoria Coated Iridium
Maximum Recommended Operating Pressure HPQ3: 1e-3 Torr (1.3e-3 mbar)
HPQ3S: 8e-3 Torr (1e-2 mbar) - Application dependant
Maximum Transient Burst Pressure 4e-2 Torr (5e-2 mbar) - gas dependant
Ion Source Sensitivity 5e-5 A/mbar
Minimum Detection Limits Partial Pressure: 8e-11 Torr (1e-10 mbar)
Concentration: 5ppm at 1e-3 Torr (1.3e-3 mbar)
(3σ baseline noise at 300ms integration)
Mass Stability ±0.1 amu over 8 hours at stable ambient
Resolution Better than 10% valley for peaks of equal height across mass range
Bakeout Temperature 250°C with electronics removed
Operating Temperature 200°C at flange with electronics <40°C
Sensor Insertion Length 25mm
Mounting Flange DN38CF (70mm/2.75inch OD) Conflat
Housing Application specific, options include CF and KF elbows or custom F-Chamber for HPQ3S with Gauge.
Electronics Weight on Flange 1.7kg
Power 24V DC, 3A external universal voltage supply (included)
Maximum Operating Conditions Electronics: 10-40°C, 80% RH (non condensing)
Communication 10/100 Base-T Ethernet, static or automatically assigned IP addresses
Data Acquisition Method Dedicated real time acquisition processor
Data Collection Methods Analog scanning, partial or full mass range 8, 16 or 32 points/amu
Barchart scanning, partial or full mass range
Peak-jump collection of any combination of peaks at up to 15 per acquisition set
Complete recipe control to link multiple acquisitions inta single scan
(Process Eye Professional and TOOLweb RGA only)
Number of Stored Source Settings 6 sets including ion source parameters, alignment, resolution, detector calibrations
Stored in electronics and recalled by Process Eye Professional or TOOLweb RGA
Software Controlled Tuning Parameters Electron energy, 20 to 100eV
Emission current, 0 to 2 mA
Ion energy, 0 to 10V
Ion extraction, 0 to -130V
Filter pole bias, 0 to -10V to +10V
Filament Protection Dedicated x-Trip with optional pressure sensor for use with cryo-pump isolation valve.
Filament interlocked to gauge OK for HPQ3S.
Data Acquisition Speed < 3ms per point for analog or barchart scanning
Settling Time <20ms
to 1 ppm of Maximum Signal
Control Method CE operating system processor with web-server interface
Command Structure Documented SDK and ASCII command protocols
Software Built-in web applications allowing RGA control and data acquisition using a platform independent web browser without the need for dedicated installed software
Process Eye Professional and TOOLweb RGA Windows software packages for Windows xP, Vista or Win7 (32 and 64bit.)
Interfaces RJ45 socket: 10/100 Base-T Ethernet
25 way D-type female: 16 configurable TTL I/O, includes power for �15V (100mA), +24V 100mA) and �3.3V 100mA)
15 way D-type female: 4 analog in (-11V to +11V 22bit), 2 analog outputs (0-10V 12bit), includes power for �15V 100mA)
9 way D-type female dedicated vacuum gauge port: -11 to +11V 22bit analog input, 1 digital input (gauge OK), 1 digital output (gauge enable) and gauge power +24V (500mA)
3.5mm jack socket: Opto-isolated input for filament protect or control with autdetection of presence of the jack plug as failsafe
2.5mm jack socket: Audioutput for use with speaker and wired or wireless headphones
Compliance CE (control unit)

Specifications are subject to change without notice.
Copyright MKS Instruments, Inc. unless noted otherwise.

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Contact an Applications Specialist by sending an email to MKS Instruments or call 408-750-0300.