HA-MFV High Accuracy Mass Flow Verifier

More about the HA-MFV, High Accuracy Mass Flow Verifier here

Mass Flow Verification Accuracy1 ±1.0% of reading
Mass Flow Verification Range2 5 to 3000 sccm N2 equivalent
Repeatability ±0.5% of reading
Reproducibility ±0.3% of reading
Pressure Range 100 Torr
Pressure Accuracy 0.25% of reading
Proof Pressure 45 psia
Burst Pressure 150 psig
Pneumatic Air Supply Pressure
Minimum 80 psig
Maximum 100 psig
Temperature Coefficients <0.002% Reading/°C (Span)
Warm up Time 60 minutes
Normal Operating Temperature 10° to 40°C
Temperature Display 0° to 100°C
Temperature Readout Units °C
Temperature Accuracy +2°C
Temperature Resolution 0.1°C
Storage Humidity Range 0 to 95% RH non-condensing
Storage Temperature -20° to 60°C (-4° to 160°F)
Control Interface Options
DeviceNet™ I/O 5-pin DeviceNet™ Micro Connector Type
EtherCAT® Dual RJ-45 (Comm.) M8 Male 5pin (PWR)
Diagnostic Interface Option
EtherNet RJ-45 female
Input Voltage 11 to 25 VDC (DeviceNet™ compatible)
11 to 25VDC +24 VDC (±10%) (EtherCAT®)
Input Current/Voltage Required
Max Current at Start Up +24 VDC (±5%) @ 500 mA
Avg Current at Steady State +24 VDC (±5%) @ 375 mA (valves closed)
Process Connections
Gas Supply Swagelok® compatible 8-VCR® female rotatable
Vacuum Supply Swagelok® compatible 8-VCR® male type, rotatable
Pneumatic Air Supply 1/8 inch one-touch quick connect tube
Leak Integrity
External <1 x 10-9 scc/sec He
Materials Wetted
Volume 316L SST passivated, Inconel, Incoloy
Seals 316 SST nickel plated
Valve Seat PCTFE with Elgiloy® Diaphragm
Surface Finish <32µ inches Ra
Dimensions 6.98 in x 10.0 in x 10.0 in
177.3 mm x 254.0 mm x 254.0 mm
(height x width x length) overall
Weight 23.9 lbs (10.9 kg)
Compliance3 EMC Directive 2004/108/EEC (Electromagnetic Compatibility)
EMC Directive 2004/108/EC (Electrical/Communications)

1 Includes non-linearity, hysteresis, and non-repeatability.

2 Maximum flow rate may be limited by specific gas properties, e.g. vapor pressure. Please consult factory for latest gas and flow rate list.

3 An overall metal braided, shielded cable, properly grounded at both ends, is required during use.

Specifications are subject to change without notice
VCR® is a registered trademark of Swagelok® Company.
Elgiloy® is a registered trademark of Elgiloy® Limited Partnerships.
Copyright MKS Instruments, Inc. unless noted otherwise.

Need help?

Contact an Applications Specialist by sending an email to MKS Instruments, or call 978-645-5500.