Specifications

HA-MFV High Accuracy Mass Flow Verifier

More about the HA-MFV, High Accuracy Mass Flow Verifier here

HA-MFV
Mass Flow Verification Accuracy1 ±1.0% of reading
Mass Flow Verification Range2 5 to 3000 sccm N2 equivalent
Repeatability ±0.5% of reading
Reproducibility ±0.3% of reading
Pressure Range 100 Torr
Pressure Accuracy 0.25% of reading
Proof Pressure 45 psia
Burst Pressure 150 psig
Pneumatic Air Supply Pressure
Minimum 80 psig
Maximum 100 psig
Temperature Coefficients <0.002% Reading/°C (Span)
Warm up Time 60 minutes
Normal Operating Temperature 10° to 40°C
Temperature Display 0° to 100°C
Temperature Readout Units °C
Temperature Accuracy +2°C
Temperature Resolution 0.1°C
Storage Humidity Range 0 to 95% RH non-condensing
Storage Temperature -20° to 60°C (-4° to 160°F)
Control Interface
DeviceNet™ I/O 5-pin DeviceNet™ Micro Connector Type
Diagnostic Interface Option
EtherNet RJ-45 female
Input Voltage 11 to 25 VDC
Input Current/Voltage Required
Max Current at Start Up +24 VDC (±5%) @ 500 mA
Avg Current at Steady State +24 VDC (±5%) @ 375 mA (valves closed)
Process Connections
Gas Supply Swagelok® compatible 8-VCR® female rotatable
Vacuum Supply Swagelok® compatible 8-VCR® male type, rotatable
Pneumatic Air Supply 1/8 inch one-touch quick connect tube
Leak Integrity
External <1 x 10-9 scc/sec He
Materials Wetted
Volume 316L SST passivated, Inconel, Incoloy
Seals 316 SST nickel plated
Valve Seat PCTFE with Elgiloy® Diaphragm
Surface Finish <32µ inches Ra
Dimensions 6.98 in x 10.0 in x 10.0 in
177.3 mm x 254.0 mm x 254.0 mm
(height x width x length) overall
Weight 23.9 lbs (10.9 kg)
Compliance CE
Notes:

1 Includes non-linearity, hysteresis, and non-repeatability.

2 Maximum flow rate may be limited by specific gas properties, e.g. vapor pressure. Please consult factory for latest gas and flow rate list.

Specifications are subject to change without notice
VCR® is a registered trademark of Swagelok® Company.
Elgiloy® is a registered trademark of Elgiloy® Limited Partnerships.
Copyright MKS Instruments, Inc. unless noted otherwise.

Need help?

Contact an Applications Specialist by sending an email to MKS Instruments, or call 978-645-5500.