Gas Correction Factors for Ionization Vacuum Gauges

The values in the following table are the gas correction factors for various gases with respect to Nitrogen for both hot cathode and cold cathode ionization vacuum gauges.

In a gauge calibrated for Nitrogen, where the predominant gas being measured is other than Nitrogen, divide the actual gauge reading by the appropriate gas correction factor to get the corrected pressure value for the specific gas being measured.

Gas Symbol Gas Correction Factor
Acetone(CH3)2CO3.60
Air- - -1.00
AmmoniaNH31.30
ArgonAr1.29
BenzeneC6H65.90
BromineBr23.80
BromomethaneCH3Br3.70
Carbon DioxideCO21.42
Carbon DisulfideCS25.00
Carbon MonoxideCO1.05
Carbon TetrachlorideCCl46.00
ChlorineCl20.68
DeuteriumD20.35
HeliumHe0.18
HydrogenH20.46
Hydrogen BromideHBr2.00
Hydrogen ChlorideHCl1.50
Hydrogen FluorideHF1.40
IsobutyleneC4H83.60
KryptonKr1.94
MethaneCH41.40
NeonNe0.30
Nitric OxideNO1.30
NitrogenN21.00
Nitrogen OxideNO1.16
Nitrous OxideN2O1.50
OxygenO21.01
PhosphinePH32.60
PropaneC3H84.20
Sulfur DioxideSO22.10
Sulfur HexafluorideSF62.50
xenonxe2.87

Find gas correction factors for thermal-based mass flow controllers here.

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