GM100A Metal-sealed, Digital Mass Flow Controller/Meter

More about the GM100A here

Full Scale Flow Ranges 50,000 - 100,000 sccm
Maximum Inlet Pressure 150 psig
(can not exceed pressure differential requirement across MFC)
Normal Operating Pressure Differential 50,000 - 100,000 sccm; 40 to 80 psid
(N2 Full Scale with atmospheric pressure at the MFC outlet)
Proof Pressure 1000 psig
Burst Pressure 1500 psig
Control Range 2% to 100% of Full Scale (range on mech.)
Typical Accuracy ± 1% of set point for 20 to 100% Full Scale
± 0.2% of Full Scale for 2 to 20% Full Scale
(with N2 calibration gas)
Repeatability ± 0.3% of Reading
Resolution 0.1% of Full Scale
Temperature Coefficients
Zero <0.05% of Full Scale/°C
Span <0.08% of Rdg./°C
Inlet Pressure Coefficient <0.02% of Rdg./psi
Typical Controller Settling Time <750 msec., typical above 10% Full Scale
(per SEMI Guideline E-17-0600)
Warm-up Time 30 min
(to within 0.2% of Full Scale of steady state performance)
Operating Temperature Range 10°C to 50°C (Ambient)
Storage Humidity 0 to 95% Relative Humidity, non-condensing
Storage Temperature -20° to 80°C (-4° to 149° F)
Fittings Compatible with:
Swagelok® 4 VCR® high flow male, Swagelok 8 VCR male, 1/2 inch Swagelok, 10mm Swagelok, KF-16
Leak Integrity
External <1 x 10-10 (scc/sec He)
Through Closed Valve <1.0% of Full Scale at 40 psig inlet to atmosphere
(to assure no flow-through, a separate positive shut-off valve is required)
Wetted Materials
Standard 316L Stainless Steel VAR (equivalent to 316 stainless steel SCQ for semiconductor quality)
316 Stainless Steel
Elgiloy®, Nickel
Valve Seat Viton®, Buna, EPDM or Neoprene
Surface Finish
MFC 10µ inch average Ra (electropolished)
MFM 16µ inch average Ra
Weight <3 lbs (1.4kg)
Compliance CE
Input Power Required +15 to +24 VDC @ (<4 watts)
Flow Input/Output Signal
Voltage (0 to 5 VDC) 15 pin Type "D" male, 9 pin Type "D" male
Current 15 pin Type "D" male (4 to 20 mA)
Input Power Required
DeviceNet™ +11 to +25 VDC per (<4 watts)
RS-485 +15 to +24 VDC per (<4 watts)
Profibus® +15 to +24 VDC per (<4 watts)
EtherCAT® +24 VDC per (<5 watts)
PROFINET® +24 VDC per (<5 watts)
DeviceNet™ 5 pin micro connnector (power and comm.)
RS-485 9 pin Type D male (power and comm.)
Profibus® 9 pin Type D male (power)
9 pin Type D female (comm.)
EtherCAT® 2 x RJ-45 (comm.) male
M8 male, 5 pin (power)
PROFINET® 2 x RJ-45 (comm.) male
M8 male, 5 pin (power)
Data Rate Switch/Selection
DeviceNet™ 4 positions: 125, 250, 500K (Default)
programmable over network
RS-485 No switch
Set Data Rate via RS485
Profibus® Set Data Rate via Profibus
EtherCAT® No switch
PROFINET® No switch
Comm. Rate(s)
DeviceNet™ 125 Kbps, 250 Kbps, 500 Kbps
RS-485 9.6 Kbps, 19.2 Kbps, 38.4 Kbps
Profibus® 9.6 Kbps to 12 Mbps
EtherCAT® 100 Mbps
PROFINET® 100 Mbps
MAC ID Switches/Addresses
DeviceNet™ 2 switches, 10 positions
0,0 to 6,3
1 to 254
RS-485 Set address over RS485
Station Addresses 0,0 to 9,9
Profibus® 2 switches, 10 positions
EtherCAT® 3 switches, 16 positions
Network Size
DeviceNet™ Up to 64 nodes
RS-485 Up to 32 nodes
Profibus® Up to 99 nodes
EtherCAT® Up to 4095 nodes
Visual Communication Indicators
DeviceNet™ LED network status (green/red)
LED module status (green/red)
RS-485 LED Comm (yellow)
LED Error (red)
Profibus® LED Comm (green/red)
LED Error (green/red)
EtherCAT® LED Power (green)
LED Run (green)
LED Error (red)
LED /Comm (green)
PROFINET® LED Maint (amber)
LED BUS Fault (red)
LED Ready (green)
LED Sys Fault (red)

Specifications are subject to change without notice.
VCR® is a registered trademark of Swagelok® Company.
VCR® and VCO® are registered trademarks of Swagelok Marketing Co., Solon, OH.
Viton® is a registered trademark of E.I. Dupont Company, Wilmington, DE.
Elgiloy® is a registered trademark of Elgiloy Specialty Metals, Elgin, IL.
Copyright MKS Instruments, Inc. unless noted otherwise.

Need help?

Contact an Applications Specialist by sending an email to MKS Instruments, or call 978-645-5500.