Specifications

GE50A Elastomer-sealed, Digital Mass Flow Controller

More about the GE50A here

GE50A
Full Scale Flow Ranges 5 - 50000 sccm (N2 equivalent)
(consult factory for available flow ranges)
Maximum Inlet Pressure 150 psig
(can not exceed pressure differential requirement across MFC)
Normal Operating Pressure Differential 10 to 5000 sccm; 10 to 40 psid
10000 to 20000 sccm; 15 to 40 psid
30000 to 50000 sccm; 25 to 40 psid
(N2 Full Scale)
(with atmospheric pressure at the MFC outlet)
Proof Pressure 1000 psig
Burst Pressure 1500 psig
Control Range 2% to 100% of Full Scale (range on mech.)
Typical Accuracy ±1% of set point for 20 to 100% Full Scale
± 0.2% of Full Scale for 2 to 20% Full Scale
(with N2 calibration gas)
Repeatability ± 0.3% of Reading
Resolution 0.1% of Full Scale
Temperature Coefficients
Zero <0.05% of Full Scale/°C
Span <0.08% of Reading/°C
Inlet Pressure Coefficient <0.02% of Reading/psi
Typical Controller Settling Time <750 msec, typical above 5% Full Scale
(per SEMI Guideline E-17-0600)
Warm-up Time <30 minutes
(to within 0.2% of Full Scale of steady state performance)
Operating Temperature Range 10°C to 50°C (Ambient)
Storage Humidity 0 to 95% Relative Humidity, non-condensing
Storage Temperature -20° to 80°C (-4° to 149° F)
Fittings Compatible with:
Swagelok® 4 VCR® male, Swagelok VCO® male, 1/4 inch Swagelok compression seal, Swagelok 8 VCR male, 1/8 inch Swagelok, 1/2 inch Swagelok, 6 mm Swagelok, 8 mm Swagelok, KF-16, 3/8 inch Swagelok, 8 VCO Male, 10mm Swagelok, 12mm Swagelok, C-seal, 2 VCR male
Leak Integrity
External <1 x 10-09 (scc/sec He)
Through closed valve Up to 10K valve <0.1% of FS at 40 psig to atmosphere
20K - 50K valve <1.0% of FS at 40 psig to atmosphere
(To assure no flow-through, a separate positive shut-off valve is required.)
Wetted Materials
Standard 316L S.S. VAR (equivalent to 316 S.S. SCQ for semiconductor quality), 316 S.S., Elgiloy®, Nickel
Seals & Valve Seat Viton, Buna-N, Neoprene, Kalrez
Surface Finish 16µ inch average Ra
Weight less than 3 lbs (1.4kg)
Compliance Compliant to EMC Directive 2014/30/EU
Electrical Analog I/O Input Power Required +15 to +24 VDC @ (<4 watts)
Electrical Analog I/O Flow Input/Output Signal
Voltage (0 to 5 VDC) 15 pin Type "D" male, 9 pin Type "D" male
Current (4 to 20 mA) 15 pin Type "D" male
Input Power Required
DeviceNet™ +11 to +25 VDC per (<4 watts)
RS-485 +15 to +24 VDC per (<4 watts)
Profibus® +15 to +24 VDC per (<4 watts)
EtherCAT® +24 VDC per (<5 watts)
PROFINET® +24 VDC per (<5 watts)
Connector
DeviceNet™ 5 pin micro connnector (power and comm.)
RS-485 9 pin Type D male (power and comm.)
Profibus® 9 pin Type D male (power); 9 pin Type D female (comm.)
EtherCAT® 2 x RJ-45 (comm.) male; M8 male, 5 pin (power)
PROFINET® 2 x RJ-45 (comm.) male; M8 male, 5 pin (power)
Data Rate Switch/Selection
DeviceNet™ 4 positions: 125, 250, 500K (Default)programmable over network
RS-485 No switch Set Data Rate via RS485
Profibus® Set Data Rate via Profibus
EtherCAT® No switch
PROFINET® No switch
Comm. Rate(s)
DeviceNet™ 125 Kbps, 250 Kbps, 500 Kbps
RS-485 9.6 Kbps, 19.2 Kbps, 38.4 Kbps
Profibus® 9.6 Kbps to 12 Mbps
EtherCAT® 100 Mbps
PROFINET® 100 Mbps
MAC ID Switches/Addresses
DeviceNet™ 2 switches, 10 positions; 0,0 to 6,3 ; 1 to 254
RS-485 Set address over RS485; Station Addresses 0,0 to 9,9
Profibus® 2 switches, 10 positions
EtherCAT® 3 switches, 16 positions
PROFINET® N/A
Network Size
DeviceNet™ Up to 64 nodes
RS-485 Up to 32 nodes
Profibus® Up to 99 nodes
EtherCAT® Up to 4095 nodes
PROFINET® N/A
Visual Communication Indicators
DeviceNet™ LED network status (green/red)
LED module status (green/red)
RS-485 LED Comm (yellow)
LED Error (red)
Profibus® LED Comm (green/red)
LED Error (green/red)
EtherCAT® LED Power (green)
LED Run (green)
LED Error (red)
LED /Comm (green)
PROFINET® LED Maint (amber)
LED BUS Fault (red)
LED Ready (green)
LED Sys Fault (red)

Specifications are subject to change without notice.
VCR® is a registered trademark of Swagelok® Company.
VCR® and VCO® are registered trademarks of Swagelok Marketing Co., Solon, OH.
Viton® is a registered trademark of E.I. Dupont Company, Wilmington, DE.
Elgiloy® is a registered trademark of Elgiloy Specialty Metals, Elgin, IL.
Copyright MKS Instruments, Inc. unless noted otherwise.

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