DELTAIV 4-zone Flow Ratio Controller

More about the DELTA IV, 4-zone Flow Ratio Controller here

Full Scale Ranges 500 sccm per channel
1000 sccm per channel
2000 sccm per channel
(N2 equivalent)
Input Flow Range 0, or 2 to 100% of each channel FS rating (N2 equivalent)
Control Accuracy ±2% of percentage set point (above 10% Full Scale)
Fittings Swagelok® 4 VCR®
Inlet: male
Outlet: male
Display 4 digits for value
4 characters for unit
Leak Integrity
External <1x10-10
(scc/sec He)
Through closed valve <2% of channel FS at 500 Torr differential to <10 Torr
Wetted Materials 316 S.S. VAR (equivalent to 316 S.S. SCQ for semiconductor quality)
316 S.S. nickel, Inconel®, KM-45, PTFE
Surface Finish 5 microinch average Ra
Communications DeviceNet™
Connector 5 pin microconnector
Input Voltage 11-25 VDC
set point and Output Signals Digital
Compliance EMC Directive 2004/108/EC (Electrical/Communications)

DELTA IV Flow Ratio Controller should not be used with any gas mixture which will react with each other as gas reactions are likely to affect the device flow measurements and may damage the device.

DELTA IV Flow Ratio Controller uses thermal sensors which add heat energy to the gas (and gas mixture) which may cause the gas to decompose and a mixture to react. Please consult MKS Applications Engineering if this is a concern for the intended application of the device.

For channels with "0%" set points, a downstream shut-off valve is required to assure no flow through the channel.

Specifications are subject to change without notice.
Swagelok® and VCR® are registered trademarks of Swagelok® Company.
DeviceNet™ is a trademark of the Open DeviceNet Vendor Association
Copyright MKS Instruments, Inc. unless noted otherwise.

Need help?

Contact an Applications Specialist by sending an email to MKS Instruments, or call 978-645-5500.