Specifications

DELTAII "Stretch Body" Flow Ratio Controller
Drop-in Replacement for the Original DELTA FRC

More about the DELTAII "Stretch Body" Flow Ratio Controller here

DELTAII "Stretch Body"
Full Scale Ranges 500/500 sccm, 1000/1000 sccm, 2000/2000 sccm, 10000/10000 sccm
(N2 equivalent)
Maximum Operating Outlet Pressure 200 torr
DELTA II will operate with outlet pressures above 200 Torr. For device performance at higher pressures, consult MKS Application Engineers.
Max. Allowable Outlet Pressure Differential 50 torr (between Q1 and Q2)
Normal Operating Pressure Differential <150 torr (N2)
Proof Pressure 1000 psig
Burst Pressure 1500 psig
Input Flow Range 5 to 100% of each channel Full Scale rating
(N2 equivalent)
Ratio Control Range 1:1 to 20:1 and 20:1 to 1:1
Ratio Accuracy 2% of ratio set point
Ratio Repeatability & Reproducibility 0.3% of ratio set point
Resolution 0.02% of channel Full Scale
Temperature Coefficient (per channel)
Zero 0.05% Full Scale/°C
Span 0.08% Reading/°C
Ratio Settling Time <2 seconds
Warm-up Time <30 minutes
Normal Operating Temperature 10 to 40°C
Storage Temperature -20 to 65°C
Storage Humidity 0 to 95% relative humidity, non-condensing
Temperature Display 0 to 100°C
Temperature Readout Units °C
Temperature Accuracy ±2°C
Temperature Resolution 0.1°C
Fittings Swagelok® 4 VCR®
Inlet: male (non-rotatable)
Outlets: male (non-rotatable)
Display 4 digits for value, 4 characters for unit
Leak Integrity
External <1x10-10 (scc/sec He)
Through Closed Valve <2% of Channel FS at 400 torr differential to vacuum
Wetted Materials 316 stainless steel VAR (equivalent to 316 stainless steel SCQ for semiconductor quality)
316 stainless steel, Inconel®, KM-45, PTFE
Surface Finish 5 microinch average Ra
Weight Less than 5 lbs. (2.3 kg)
Connector Digital I/O: 5 pin microconnector (DeviceNet™)
Input Voltage Digital I/O: 11-25 VDC
Power Consumption <9 Watts
Set Point and Output Signals Digital I/O: Digital
Compliance Compliant to EMC Directive 2004/108/EC
Notes:

The MKS DELTA II Flow Ratio Controller shall not be used with any gas mixtures which will react with each other as gas reactions are likely to affect the device flow measurements and may damage the device.

The MKS DELTA II Flow Ratio Controller uses thermal sensors which add heat energy to the gas (and gas mixture) which may cause the gas to decompose and a mixture to react. Please consult MKS Applications Engineering if this is a concern for the intended application of the device.

Specifications are subject to change without notice.
VCR® is a registered trademark of Swagelok® Company.
Copyright MKS Instruments, Inc. unless noted otherwise.

Need help?

Contact an Applications Specialist by sending an email to MKS Instruments, or call 978-645-5500.