Specifications

DELTAIII 3-zone Flow Ratio Controller

DELTA™III DeviceNet™ EtherCAT™
Full Scale Ranges 500, 1000, 2000, and 10000 sccm (each channel) (nitrogen equivalent-Q) 500, 1000, 2000, and 10000 sccm (each channel) (nitrogen equivalent-Q)
Percentage Accuracy ±2% set point (for percent set points above 10%) ±2% set point (for percent set points above 10%)
Percentage Flow Control Range 0, 5 to 100% Full Scale 0, 5 to 100% Full Scale
Percentage Repeatability ±0.3% of set point ±0.3% of set point
Resolution 0.02% of channel Full Scale 0.02% of channel Full Scale
Percentage Range 0, 5 to 100% of total flow within flow channel control range 0, 5 to 100% of total flow within flow channel control range
Maximum Operating Outlet Pressure 200 Torr at maximum flow rate through all channels 200 Torr at maximum flow rate through all channels
Maximum Allowable Outlet Pressure Differential 50 Torr with the same percentage flow through all channels (highest to lowest pressure channel) 50 Torr with the same percentage flow through all channels (highest to lowest pressure channel)
Normal Operating Pressure Differential <150 Torr; Except, <450 Torr for 10K/10K <150 Torr; Except, <450 Torr for 10K/10K
Percentage Settling Time <3 seconds (typical dependent on downstream conductance matching) <3 seconds (typical dependent on downstream conductance matching)
Maximum Inlet Pressure 150 psig (non-operational) 150 psig (non-operational)
Zero Temperature Coefficient <0.05% Full Scale/°C (500 ppm) <0.05% Full Scale/°C (500 ppm)
Span Temperature Coefficient <0.08% of Reading/°C (800 ppm) <0.08% of Reading/°C (800 ppm)
Warm Up Time 60 minutes (minimum with device powered and at equilibrium with ambient) 60 minutes (minimum with device powered and at equilibrium with ambient)
Normal Operating Temperature 10-40°C 10-60°C
Storage Temperature -20-65°C -20-65°C
Storage Humidity 0 to 95% relative humidity, non-condensing 0 to 95% relative humidity, non-condensing
Temperature Display 0-100°C 0-100°C
Temperature Readout Units °C °C
Temperature Accuracy +2°C +2°C
Temperature Resolution 0.1°C 0.1°C
Fittings Swagelok male: 4 VCR male, non-rotatable Swagelok male: 4 VCR male, non-rotatable
Display 4 digits for value, 4 characters for unit 4 digits for value, 4 characters for unit
External Leak Integrity <1x10-10 (scc/sec He) <1x10-10 (scc/sec He)
Leak Integrity Through Closed Valve <2% of channel Full Scale at 500 Torr differential to <10 Torr <2% of channel Full Scale at 500 Torr differential to <10 Torr
Wetted Materials 316 Stainless Steel VAR (equivalent to 316 Stainless Steel SCQ for semiconductor quality), 316 Stainless Steel nickel, Inconel, KM-45, PTFE 316 Stainless Steel VAR (equivalent to 316 Stainless Steel SCQ for semiconductor quality), 316 Stainless Steel nickel, Inconel, KM-45, PTFE
Surface Finish 5 microinch average Ra 5 microinch average Ra
Communications DeviceNet EtherCAT
Connector 5 pin microconnector 5 pin M8 microconnector
Power consumption 11-25 VDC <15 Watts
Set Point and Output Signals Digital Digital
Compliance CE CE

DELTA III Flow Ratio Controller should not be used with any gas mixture which will react with each other as gas reactions are likely to affect the device flow measurements and may damage the device.

DELTA III Flow Ratio Controller uses thermal sensors which add heat energy to the gas (and gas mixture) which may cause the gas to decompose and a mixture to react. Please consult MKS Applications Engineering if this is a concern for the intended application of the device.

For channels with "0%" set points, a downstream shut-off valve is required to assure no flow through the channel.

Specifications are subject to change without notice.
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Copyright MKS Instruments, Inc. unless noted otherwise.

Need help?

Contact an Applications Specialist by sending an email to MKS Instruments, or call 978-645-5500.