More about the Cirrus3-XD here

Dimensions & Weight
Benchtop system 593mm long, 291mm wide, 470mm high; 35 Kg
Rack-mounted system 577mm long, 482mm wide, 266mm high; (6U), 35 Kg
Mass Range 1 to 100, 100HP, 200 or 300
Detection Limits Gas and Mass Independent
the minimum detectable concentration 3 sigma baseline noise is <15 ppb
(specified with Argon or Nitrogen)
Electron Energy & Emission Current Operator variable
Maximum Operating Temperature 5°C to 35°C, 20% to 80% RH (non-condensing)
(Turbo pump & electronics)
Oven Temperature 180°C for bakeout, user-definable for operation - typically 80°C
(Vacuum chamber & inlet interface)
Capillary Inlet 2.0 m long with 1/4 inch Swagelok® end connection, heated to 150°C
(optional heating to 300°C, with stainless steel only).
Standard fused silica and optional stainless steel.
Gas Consumption 20 ml/min, lower uptake rate capillaries options are available
Sample Pressure 1 bar nominal
Pumping System High compression turbo-molecular pump with internal 4-stage diaphragm backing pump standard, corrosive gas pumping with all internal pumps optional
Automated Inlet Pressure Controller A 640 (Baratron® capacitance manometer based) automated inlet pressure controller is available as an option
Recommended PC Spec Microsoft® 32 bit or 64 bit Windows® 7 or 10
Computer Interface 1 x LAN port required
I/O Capability 4 analog inputs (-11 to +11 volt, 22 bit)
2 analog outputs (0-10 volt, 12 bit)
16 TTL digital I/O
Power Universal mains input 100-240 VAC/50-60 Hz
Power supply specified at 700W.
Maximum consumption(during bakeout) typically 300W
Compliance CE

Specifications are subject to change without notice.

Microsoft® and Windows® are registered trademarks of Microsoft Corporation.
Swagelok® is a registered trademark of Swagelok Marketing Co.

Need help?

Contact an Applications Specialist by sending an email to MKS Instruments or call 408-750-0300.