Specifications

AX7610 Downstream Plasma Source

More about the AX7610 Downstream Plasma Source here

AX7610-Q, AX7610-S
Maximum Power Output 3.0 kW
Cooling Water (3/8 in. Swagelok® fitting)
0.35 gpm, 30°C Max at 30psid minimum
Inlet Gas Fitting 1/4 or 3/8 inch VCR®
Output Flange KF40, KF50 or custom
Overall Length 15.3 in (388 mm)
Plasma Tube Diameter 1.0 in. (25mm)
Weight 10 lb. (4.5 kg)
Electrical requirements for UV Lamp 24 VDC, 1.0 Amp
Process Gas Compatibility
Quartz Tube O2, N2, H2O, Ar, non-fluorine based gases
Operating pressure* 1-8 Torr typical
Sapphire Tube O2, N2, H2O, Ar, NF3, CF4, C2F6, and other Fluorine-based gases
Operating pressure* 2 to 8 Torr typical
Options Q Quartz tube: AX7610
S Sapphire tube: AX7610
Component Replacement Kits Spare quartz tube assembly: SA7610QTZ4
Spare sapphire tube assembly: SA7610SAPP4

Specifications are subject to change without notice.
VCR® is a registered trademark of Swagelok® Company.
Copyright MKS Instruments, Inc. unless noted otherwise.

Need help?

Contact an Applications Specialist by sending an email to MKS Instruments, or call 978-645-5500.