179C Mass-Flo® Metal-Sealed Mass Flow Meter

Full Scale Ranges 10, 20, 50, 100, 200, 500, 1000, 2000, 5000, 10000, 20000 sccm
(N2 equivalent)
Maximum Inlet Pressure 500 psig
Normal Operating Pressure Differential 10 Torr at 10 to 20000 sccm
(with atmospheric pressure at the MFM outlet)
Measurement Range 1% to 100% of Full Scale
±1.0% of Full Scale
(including non-linearity, hysteresis, and non-repeatability referenced to 760 mmHg and 0°C)
Repeatability ±0.2% of Full Scale
Resolution 0.1% of Full Scale
Temperature Coefficients
Zero <0.05% of Full Scale/°C
Span <0.08% of Rdg./°C
Warm-up Time 2 minutes
(to within 0.2% of Full Scale of steady state <2 min performance)
Pressure Coefficient <0.02% of Reading/psi
Normal Operating Temperature Range 0°C to 50°C
Input Voltage Required
Max. at start-up (first 2 sec.) ±15 VDC (±5%) @ 150 mA
Typical at steady state ±15 VDC (±5%) @ 50 mA
Output Signal 0 to 5 VDC into >10K Ω
Output Impedance <1 Ω
Connector Types Analog, 9-pin or 15-pin Type "D"
(The 15-pin Type "D" connector is electronically compatible with other MKS flow controllers. Consult MKS Applications Engineering at 800-227-8766 for details)
Wetted Materials
Standard 316L S.S.
Optional VCO fittings - consult factory
Leak Integrity <1 x 10-9
External (scc/sec He)
Fittings (compatible with) Swagelok® 4 VCR®, Swagelok 4 VCO®, ¼ inch Swagelok®
Compliance CE

Specifications are subject to change without notice.
VCR® is a registered trademark of Swagelok® Company.
Copyright MKS Instruments, Inc. unless noted otherwise.

Need help?

Contact an Applications Specialist by sending an email to MKS Instruments, or call 978-645-5500.