1579 Digital, Elastomer-sealed, High Flow Rate Mass Flow Controller

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Flow Range Full Scale (N2 in slm) 50, 100, 200, 300 slm
Max. Inlet Pressure 100 psig
Normal Operating Pressure Differential
(with atmospheric pressure at the MFC outlet)
50, 100 slm 15 to 60 psid
200 slm 25 to 60 psid
300 slm 40 to 60 psid
Control Range 2 to 100% of Full Scale
(including non-linearity, hysteresis and non-repeatability; referenced to 760 mmHg and 0°C)
Standard ±1% of Full Scale
Optional - Consult Factory ±(0.8% of Rdg +0.2% Full Scale)
Repeatability ± 0.2% of Full Scale
Resolution 16 Bit
Temperature Coefficients
Zero <0.05% of Full Scale /°C
Span <0.10% of Full Scale /°C
Warm-Up Time <30 min
Controller Settling Time <1 s typical
Pressure Coefficient ± 0.02% of Rdg/psi
Normal Operating Temperature Range 15°C to 40°C (59°F to 104°F)
Input Voltage Required 20.5 to 30 VDC
Max. Current 300 mA
Set Point Command Signal 0 to 5 VDC from < 20 kΩ
Output Signal 0 to 5 VDC into > 10 kΩ
Connector Types
Analog 15-pin Type "D" male
Profibus 2 x 9-pin Type "D" male (analog) and female (Profibus)
Wetted Materials
Standard 316L S.S.T, Nickel, Viton®
Optional (Seals and valve seat) Buna-N, Neoprene®, Kalrez®
Leak Integrity
External <1 x 10-9 scc/sec He
Through closed valve <0.1% of Full Scale
Standard 8 VCR® male
Optional 8 VCO® male, DN 16 KF
1/2" Swagelok®, 12 mm Swagelok®
4 VCR® male (for 50 slm only)
Compliance CE

Specifications are subject to change without notice.
VCR® is a registered trademark of Swagelok® Company.
Copyright MKS Instruments, Inc. unless noted otherwise.

Need help?

Contact an Applications Specialist by sending an email to MKS Instruments, or call 978-645-5500.