1179C Mass-Flo®General Purpose Mass Flow Controller

Full Scale Ranges 10, 20, 50, 100, 200, 500, 1000, 2000, 5000, 10000, 20000 sccm
(N2 equivalent)
Maximum Inlet Pressure 150 psig
Normal Operating Pressure Differential
(with atmospheric pressure at the MFC outlet)
10 to 5000 sccm 10 to 40 psid
10000 to 30000 sccm 15 to 40 psid
Control Range 2% to 100% of Full Scale
Accuracy (analog) ±1.0% of Full Scale
(including non-linearity, hysteresis, and non-repeatability referenced to 760 mmHg and 0°C)
Repeatability ±0.2% of Full Scale
Resolution 0.1% of Full Scale
Temperature Coefficients
Zero <0.05% of Full Scale/°C
Span <0.08% of Rdg./°C
Warm-up Time <2 min
(to within 0.2% of Full Scale of steady state performance)
Controller Settling Time <2 sec
(per SEMI Guideline E17-91)
Pressure Coefficient <0.02% of Reading/psi
Normal Operating Temperature Range 0°C to 50°C
Input Voltage Required
Max. current at start-up (first 2 sec) ±15 VDC (±5%) @ 200 mA
Typical current at steady state ±15 VDC (±5%) @ 100 mA
Set Point Command Signal 0 to 5 VDC from <20K Ω
Output Signal 0 to 5 VDC into >10K Ω
Output Impedance <1 Ω
Connector Analog, 9-pin or 15-pin Type "D"
(The 15-pin Type "D" connector is electronically compatible with other MKS flow controllers. Consult Applications Engineering for details.)
Wetted Materials
Standard 316L S.S., Viton®, nickel
Optional (seals and valve seat) Buna-N, Neoprene®, Kalrez®
Leak Integrity
External (scc/sec He) <1 x 10-9
Through closed valve <1.0% of Full Scale at 40 psig inlet to atmosphere
(To assure no flow-through, a separate positive shut-off valve is recommended.)
Fittings (comparable to) Swagelok® 4 VCR®, Swagelok 4 VCO®, ¼" Swagelok®
Compliance CE

Specifications are subject to change without notice.
VCR® is a registered trademark of Swagelok® Company.
Copyright MKS Instruments, Inc. unless noted otherwise.

Need help?

Contact an Applications Specialist by sending an email to MKS Instruments, or call 978-645-5500.