Special Application Thermal & Pressure Mass Flow Controllers

Certain process vapors and gases require mass flow controllers of a special design specific to the material as well as process conditions. MKS offers both thermal mass flow controllers and pressure based mass flow controllers for these applications that require flow control at elevated temperatures and/or low pressure drop conditions given the source material characteristics.
Showing 4 products in 4 families
View: 

Need help?

Contact an Applications Specialist bysending us an email