General Purpose 10 to 20,000 sccm Mass Flow Controller with Elastomer Seals

Products
Configuration Options
Features
Accessories
Resources
Contact Us

179c mass flow meter & 1179c mass flow controller, 10-20,000 sccm

Overview

The 1179C is a general purpose mass flow controller designed to measure and control the flow of gases in a wide variety of applications. The 1179 Mass-Flo® controllers are available with Full Scale ranges from 10 sccm to 20 slm, providing fast, repeatable flow control to as low as 0.2 sccm. It can also be used as a pressure controller when connected to a suitable pressure transducer.

Flow ranges from 10 sccm to 20 slm
Patented sensor design provides exceptional zero stability
Fast warm-up time minimizes expensive production downtime
Compatible with earlier MKS MFC and power supply/readout modules

See All Features

Products

Compare	Description	Compatibility	rankScore	Full Scale Flow Range	Seal Material	Fitting Type	Availability	Price
1179C01311CR1BV Mass Flow Controller, 10 sccm, 4 VCR Male, 0-5 VDC, DB15, Viton Seal $1,379 5 Weeks	1179C01311CR1BV Mass Flow Controller, 10 sccm, 4 VCR Male, 0-5 VDC, DB15, Viton Seal	UNIVERSAL	1.0	10 sccm	Viton	4 VCR male	5 Weeks	$1,379
1179C01311CS1BV Mass Flow Controller, 10 sccm, 0.25 in. Tube, 0-5 VDC, DB15, Viton Seal $1,379 5 Weeks	1179C01311CS1BV Mass Flow Controller, 10 sccm, 0.25 in. Tube, 0-5 VDC, DB15, Viton Seal	UNIVERSAL	1.0	10 sccm	Viton	0.25 in. tube	5 Weeks	$1,379
1179C01312CR1BV Mass Flow Controller, 100 sccm, 4 VCR Male, 0-5 VDC, DB15, Viton Seal $1,379 5 Weeks	1179C01312CR1BV Mass Flow Controller, 100 sccm, 4 VCR Male, 0-5 VDC, DB15, Viton Seal	UNIVERSAL	1.0	100 sccm	Viton	4 VCR male	5 Weeks	$1,379
1179C01312CS1BV Mass Flow Controller, 100 sccm, 0.25 in. Tube, 0-5 VDC, DB15, Viton Seal $1,379 5 Weeks	1179C01312CS1BV Mass Flow Controller, 100 sccm, 0.25 in. Tube, 0-5 VDC, DB15, Viton Seal	UNIVERSAL	1.0	100 sccm	Viton	0.25 in. tube	5 Weeks	$1,379
1179C01313CR1BV Mass Flow Controller, 1000 sccm, 4 VCR Male, 0-5 VDC, DB15, Viton Seal $1,379 5 Weeks	1179C01313CR1BV Mass Flow Controller, 1000 sccm, 4 VCR Male, 0-5 VDC, DB15, Viton Seal	UNIVERSAL	1.0	1000 sccm	Viton	4 VCR male	5 Weeks	$1,379
1179C01313CS1BV Mass Flow Controller, 1000 sccm, 0.25 in. Tube, 0-5 VDC, DB15, Viton Seal $1,379 5 Weeks	1179C01313CS1BV Mass Flow Controller, 1000 sccm, 0.25 in. Tube, 0-5 VDC, DB15, Viton Seal	UNIVERSAL	1.0	1000 sccm	Viton	0.25 in. tube	5 Weeks	$1,379
1179C01314CR1BV Mass Flow Controller, 10,000 sccm, 4 VCR Male, 0-5 VDC, DB15, Viton Seal $1,379 5 Weeks	1179C01314CR1BV Mass Flow Controller, 10,000 sccm, 4 VCR Male, 0-5 VDC, DB15, Viton Seal	UNIVERSAL	1.0	10000 sccm	Viton	4 VCR male	5 Weeks	$1,379
1179C01314CS1BV Mass Flow Controller, 10,000 sccm, 0.25 in. Tube, 0-5 VDC, DB15, Viton Seal $1,379 5 Weeks	1179C01314CS1BV Mass Flow Controller, 10,000 sccm, 0.25 in. Tube, 0-5 VDC, DB15, Viton Seal	UNIVERSAL	1.0	10000 sccm	Viton	0.25 in. tube	5 Weeks	$1,379
1179C01321CR1BV Mass Flow Controller, 20 sccm, 4 VCR Male, 0-5 VDC, DB15, Viton Seal $1,379 5 Weeks	1179C01321CR1BV Mass Flow Controller, 20 sccm, 4 VCR Male, 0-5 VDC, DB15, Viton Seal	UNIVERSAL	1.0	20 sccm	Viton	4 VCR male	5 Weeks	$1,379
1179C01321CS1BV Mass Flow Controller, 20 sccm, 0.25 in. Tube, 0-5 VDC, DB15, Viton Seal $1,379 5 Weeks	1179C01321CS1BV Mass Flow Controller, 20 sccm, 0.25 in. Tube, 0-5 VDC, DB15, Viton Seal	UNIVERSAL	1.0	20 sccm	Viton	0.25 in. tube	5 Weeks	$1,379
1179C01322CR1BV Mass Flow Controller, 200 sccm, 4 VCR Male, 0-5 VDC, DB15, Viton Seal $1,379 5 Weeks	1179C01322CR1BV Mass Flow Controller, 200 sccm, 4 VCR Male, 0-5 VDC, DB15, Viton Seal	UNIVERSAL	1.0	200 sccm	Viton	4 VCR male	5 Weeks	$1,379
1179C01322CS1BV Mass Flow Controller, 200 sccm, 0.25 in. Tube, 0-5 VDC, DB15, Viton Seal $1,379 5 Weeks	1179C01322CS1BV Mass Flow Controller, 200 sccm, 0.25 in. Tube, 0-5 VDC, DB15, Viton Seal	UNIVERSAL	1.0	200 sccm	Viton	0.25 in. tube	5 Weeks	$1,379
1179C01323CR1BV Mass Flow Controller, 2,000 sccm, 4 VCR Male, 0-5 VDC, DB15, Viton Seal $1,379 5 Weeks	1179C01323CR1BV Mass Flow Controller, 2,000 sccm, 4 VCR Male, 0-5 VDC, DB15, Viton Seal	UNIVERSAL	1.0	2000 sccm	Viton	4 VCR male	5 Weeks	$1,379
1179C01323CS1BV Mass Flow Controller, 2,000 sccm, 0.25 in. Tube, 0-5 VDC, DB15, Viton Seal $1,379 5 Weeks	1179C01323CS1BV Mass Flow Controller, 2,000 sccm, 0.25 in. Tube, 0-5 VDC, DB15, Viton Seal	UNIVERSAL	1.0	2000 sccm	Viton	0.25 in. tube	5 Weeks	$1,379
1179C01324CR1BV Mass Flow Controller, 20,000 sccm, 4 VCR Male, 0-5 VDC, DB15, Viton Seal $1,379 5 Weeks	1179C01324CR1BV Mass Flow Controller, 20,000 sccm, 4 VCR Male, 0-5 VDC, DB15, Viton Seal	UNIVERSAL	1.0	20000 sccm	Viton	4 VCR male	5 Weeks	$1,379
1179C01324CS1BV Mass Flow Controller, 20,000 sccm, 0.25 in. Tube, 0-5 VDC, DB15, Viton Seal $1,379 5 Weeks	1179C01324CS1BV Mass Flow Controller, 20,000 sccm, 0.25 in. Tube, 0-5 VDC, DB15, Viton Seal	UNIVERSAL	1.0	20000 sccm	Viton	0.25 in. tube	5 Weeks	$1,379
1179C01351CR1BV Mass Flow Controller, 50 sccm, 4 VCR Male, 0-5 VDC, DB15, Viton Seal $1,379 5 Weeks	1179C01351CR1BV Mass Flow Controller, 50 sccm, 4 VCR Male, 0-5 VDC, DB15, Viton Seal	UNIVERSAL	1.0	50 sccm	Viton	4 VCR male	5 Weeks	$1,379
1179C01351CS1BV Mass Flow Controller, 50 sccm, 0.25 in. Tube, 0-5 VDC, DB15, Viton Seal $1,379 5 Weeks	1179C01351CS1BV Mass Flow Controller, 50 sccm, 0.25 in. Tube, 0-5 VDC, DB15, Viton Seal	UNIVERSAL	1.0	50 sccm	Viton	0.25 in. tube	5 Weeks	$1,379
1179C01352CR1BV Mass Flow Controller, 500 sccm, 4 VCR Male, 0-5 VDC, DB15, Viton Seal $1,379 5 Weeks	1179C01352CR1BV Mass Flow Controller, 500 sccm, 4 VCR Male, 0-5 VDC, DB15, Viton Seal	UNIVERSAL	1.0	500 sccm	Viton	4 VCR male	5 Weeks	$1,379
1179C01352CS1BV Mass Flow Controller, 500 sccm, 0.25 in. Tube, 0-5 VDC, DB15, Viton Seal $1,379 5 Weeks	1179C01352CS1BV Mass Flow Controller, 500 sccm, 0.25 in. Tube, 0-5 VDC, DB15, Viton Seal	UNIVERSAL	1.0	500 sccm	Viton	0.25 in. tube	5 Weeks	$1,379
1179C01353CR1BV Mass Flow Controller, 5,000 sccm, 4 VCR Male, 0-5 VDC, DB15, Viton Seal $1,379 5 Weeks	1179C01353CR1BV Mass Flow Controller, 5,000 sccm, 4 VCR Male, 0-5 VDC, DB15, Viton Seal	UNIVERSAL	1.0	5000 sccm	Viton	4 VCR male	5 Weeks	$1,379
1179C01353CS1BV Mass Flow Controller, 5,000 sccm, 0.25 in. Tube, 0-5 VDC, DB15, Viton Seal $1,379 5 Weeks	1179C01353CS1BV Mass Flow Controller, 5,000 sccm, 0.25 in. Tube, 0-5 VDC, DB15, Viton Seal	UNIVERSAL	1.0	5000 sccm	Viton	0.25 in. tube	5 Weeks	$1,379

Show All

Configuration Options

Show All Configuration Options

	Description
	1179C Mass Flow Controller, Elastomer Seal, 10 - 20,000 sccm

Specifications

Control Range

2% to 100% of Full Scale
Full Scale Flow Range

10, 20, 50, 100, 200, 500, 1000, 2000, 5000, 10000, 20000 sccm (N2 equivalent)
Fitting Type

Swagelok® 4 VCR®, Swagelok 4 VCO®, ¼" Swagelok®
Analog I/O Connector

9-pin or 15-pin Type "D"
Seal Material

Buna-N, Neoprene®, Kalrez®
Maximum Inlet Pressure

150 psig
Normal Operating Pressure Differential

10 to 40 psid (10 to 5000 sccm)
15 to 40 psid (10000 to 30000 sccm)
(with atmospheric pressure at the MFC outlet)
Typical Accuracy

±1.0% of Full Scale
Repeatability

±0.2% of Full Scale
Resolution

0.1% of Full Scale
Zero Temperature Coefficient

<0.05% of Full Scale/°C

Span Temperature Coefficient

<0.08% of Reading./°C
Pressure Coefficient

<0.02% of Reading/psi
Warm-up Time

2 minutes
Typical Settling Time

<2 sec
Operating Temperature

0° to 50°C
Power Requirements

±15 VDC (200 mA start-up, 100 mA steady-state)
Set Point Command Signal

0 to 5 VDC from <20K Ω
Wetted Materials

316L S.S., Viton®, nickel
External Leak Integrity

< 1 x 10^-9
Leak Integrity Through Closed Valve

<1.0% of Full Scale at 40 psig inlet to atmosphere
Compliance

CE

Specifications

Control Range

2% to 100% of Full Scale
Full Scale Flow Range

10, 20, 50, 100, 200, 500, 1000, 2000, 5000, 10000, 20000 sccm (N2 equivalent)
Fitting Type

Swagelok® 4 VCR®, Swagelok 4 VCO®, ¼" Swagelok®
Analog I/O Connector

9-pin or 15-pin Type "D"
Seal Material

Buna-N, Neoprene®, Kalrez®
Maximum Inlet Pressure

150 psig
Normal Operating Pressure Differential

10 to 40 psid (10 to 5000 sccm)
15 to 40 psid (10000 to 30000 sccm)
(with atmospheric pressure at the MFC outlet)
Typical Accuracy

±1.0% of Full Scale
Repeatability

±0.2% of Full Scale
Resolution

0.1% of Full Scale
Zero Temperature Coefficient

<0.05% of Full Scale/°C

Span Temperature Coefficient

<0.08% of Reading./°C
Pressure Coefficient

<0.02% of Reading/psi
Warm-up Time

2 minutes
Typical Settling Time

<2 sec
Operating Temperature

0° to 50°C
Power Requirements

±15 VDC (200 mA start-up, 100 mA steady-state)
Set Point Command Signal

0 to 5 VDC from <20K Ω
Wetted Materials

316L S.S., Viton®, nickel
External Leak Integrity

< 1 x 10^-9
Leak Integrity Through Closed Valve

<1.0% of Full Scale at 40 psig inlet to atmosphere
Compliance

CE

Features

Form-Fit-Function Replacement MFC

The 1179C is a direct form-fit-function replacement for the most common MFCs on the market today. The standard 3-inch footprint enables the 1179C to drop directly into the same space without modifying existing gas lines. Electrical connectors are the same Type “D” connectors, with the same pin-outs, signals, and functions as their industry counterparts, so no cable or connector rewiring is necessary. The 1179C is compatible with MFC power supply and display electronics from MKS or other manufacturers.

Performance and Reliability

Performance and reliability have been designed into the 1179C, and ensured through rigorous MTBF analysis and extensive STRIFE testing. The 1179C complies with IEC-801 specifications for tolerance to ESD (electro static discharge) and RFI (radio frequency interference) environments. Zero and span drift are minimal with MKS’s new patented sensor, as shown by the graph below. The 1179C also complies with European CE Mark requirements. As a statement of our confidence in the performance of the 1179C, it carries a two-year warranty.

Features

Form-Fit-Function Replacement MFC

Performance and Reliability

Accessories

Description	Compatibility	Avail.	Price
CB259-5-10 Cable, Mass Flow Controller, 246, 247 or 660 Controllers, DB15, 10 ft.	UNIVERSAL	8 Weeks	$90
CB147-12-10 Cable, Mass Flow Controller, DB9, 10 ft.	UNIVERSAL	15 Weeks	$83
CB147-1-10 Cable, Mass Flow Controller, PR4000, 146, 167, 186 or 647 Controllers, DB15, 10 ft.	UNIVERSAL	8 Weeks	$101
100016745 Cable, Mass Flow Controller, 946 Controller, DB15 to HD15, 25 ft.	UNIVERSAL	1 Week	$144
100016744 Cable, Mass Flow Controller, 946 Controller, DB15 to HD15, 10 ft.	UNIVERSAL	1 Week	$94
100016746 Cable, Mass Flow Controller, 946 Controller, DB15 to HD15, 50 ft.	UNIVERSAL	8 Weeks	$249
100019087 Cable, Mass Flow Controller, 946 Controller, DB9 to HD15, 10 ft.	UNIVERSAL	10 Weeks	$105
100019088 Cable, Mass Flow Controller, 946 Controller, DB9 to HD15, 25 ft.	UNIVERSAL	8 Weeks	$168
100019089 Mass Flow Controller Cable, 946 Controller, DB9 to HD15, 50 ft.	UNIVERSAL	1 Week	$462
RCBDMFC-3-10 Cable, Mass Flow Controller, RoHS, DB9, 10 ft.	UNIVERSAL	8 Weeks	$211
RCBDMFC-1-10 Cable, Mass Flow Controller, 246, 247 or 660 Controllers, RoHS, DB15, 10 ft.	UNIVERSAL	8 Weeks	$130
RCBDMFC-4-10 Cable, Mass Flow Controller, PR4000, 146, 167, 186 or 647 Controllers, RoHS, DB15, 10 ft.	UNIVERSAL	8 Weeks	$157