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MKS Instruments at SPS IPC Drives 2017
November 28-30| Nuremberg, Germany | Hall 2 - Stand #639

SPS IPC Drives is the exhibition for electric automation technology. It covers all components down to complete systems and integrated automation solutions. The exhibitors - manufacturers of electric automation technology - present products and services from the following sectors:

  • Control technology
  • IPCs
  • Electric drive systems and components
  • Human-machine-interface devices
  • Industrial communication
  • Industrial software & digital production
  • Interface technology
  • Mechanical infrastructure
  • Sensor Technology

Stop by stand #639, hall 2 to see MKS Instrument's broad portfolio of EtherCAT® products.

Automation & Controls

Today's customers have complex automation solution requirements: systems must be scalable and expandable to several environments, seamlessly integrated, and improve time to market. Increased reliability, off the shelf product availability, newer connectivity, IoT platforms, and support for Industry 4.0 are becoming standard requirements.

MicroNode™ I/O Compact Networked I/O

PAC 100 Programmable Automation Controller

MultiTherm™ 2000 Modular Temperature Controller

MFCs are available in thermal and pressure based sensor technologies, analog and digital communication, and metal or elastomer seals. Enabling our customers to bring their products and processes to market faster, more reliably, and more cost effectively is at the heart of our flow measurement and control product design philosophy.

DELTA™ III 3-zone Flow Ratio Controller

G-Series General Purpose Thermal Mass Flow Controllers & Meters

The MKS family of vacuum isolation valves includes bellows and ball valves, manual, pneumatic and electro-pneumatic actuated valves in heated or unheated angle and inline configurations, safety shut off valves and soft start valves. Our pressure control valve line includes butterfly and poppet throttle valves with integrated control subsystems.

GPCA General Purpose Pressure Controller

PPCA Pressure Controller

T3Bi High Speed Exhaust Throttle Valve

MKS is the leader in pressure measurement. The MKS family of pressure measurement instruments includes Baratron® Capacitance Manometers, Pressure Sensors, Pressure Switches, Pressure Control Subsystems, Vacuum & Pressure Gauges, Vacuum & Pressure Transducers, and Vacuum & Pressure Gauge Controllers.

DA02A e-Baratron® Temperature-controlled, EtherCAT® Capacitance Manometer

DA03A e-Baratron® High-temperature, EtherCAT® Capacitance Manometer

MKS Handbook

This comprehensive 200+ page text was initially conceived as training material for our employees. As it has evolved, we want to share it with you, our customers, suppliers, and partners in the semiconductor industry at no charge, with the hope that you will find it informative and of some value to your work.

Download the MKS Instruments Handbook "Semiconductor Devices and Process Technology" here