HPS Series 953 Pirani/Cold Cathode
Vacuum Sensor System
15-pin Accessory Connector
|
Pin
|
Description
|
| 1 |
Pirani Set Point Relay 1 - Normally Closed Contact |
| 2 |
Pirani Set Point Relay 1 - Common |
| 3 |
Pirani Set Point Relay 1 - Normally Open Contact |
| 4 |
Cold Cathode Set Point Relay 2 - Normally Closed Contact |
| 5 |
Cold Cathode Set Point Relay 2 - Common |
| 6 |
Cold Cathode Set Point Relay 2 - Normally Open Contact |
| 7 |
Not Used |
| 8 |
Not Used |
| 9 |
High Voltage Disable |
| 10 |
Pirani Analog Output |
| 11 |
Cold Cathode Analog Output |
| 12 |
Ground |
| 13 |
Ground |
| 14 |
Pirani - Cold Cathode Switchover Disable |
| 15 |
Pirani - Cold Cathode Switchover Disable |
Download a PDF version of this file.
Note:
This information is subject to change without notice.
Need help?
Contact MKS Instruments by sending an email to MKS or call 800-227-8766 or 978-284-4000 (outside the USA).