HPS® Series 901/901 Plus
Loadlock Transducer (LLT)
MicroPirani/Piezo Vacuum Sensor
|
Pin
|
Description
|
| 1 |
RS485(-) / 232 transmit |
| 2 |
RS485(+) / 232 receive |
| 3 |
Power (+) |
| 4 |
Power (-) |
| 5 |
Analog Output (+) |
| 6 |
Analog Output (-) |
| 7 |
Relay #1 NO |
| 8 |
Relay #1 Common |
| 9 |
Relay #1 NC |
| 10 |
Relay #2 NC |
| 11 |
Relay #2 Common |
| 12 |
Relay #2 NO |
| 13 |
Relay #3 NC |
| 14 |
Relay #3 Common |
| 15 |
Relay #3 NO |
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Note:
This information is subject to change without notice.
Need help?
Contact MKS Instruments by sending an email to MKS or call 800-227-8766 or 978-284-4000 (outside the USA).