1579 Mass Flow Controller and 579 Mass Flow Meter
1579/579 Analog Version
|
Pin
|
±15 VDC Supply
|
±24 VDC Supply
|
| 1 |
Reserved |
Reserved |
| 2 |
Flow Signal |
Flow Signal |
| 3 |
Valve Close* |
Valve Close* |
| 4 |
Valve Open* |
Valve Open* |
| 5 |
Supply Common |
Reserved |
| 6 |
-15 V Supply |
24 V Common |
| 7 |
+15 V Supply |
+24 V Supply |
| 8 |
Setpoint Input* |
Setpoint Input* |
| 9 |
NC |
NC |
| 10 |
NC |
NC |
| 11 |
Signal Common |
Signal Common |
| 12 |
Signal Common |
Signal Common |
| 13 |
NC |
NC |
| 14 |
NC |
NC |
| 15 |
Chassis Ground |
Chassis Ground |
| * Not applicable with mass flow meter type 579 |
1579/579 Profibus Version
|
Pin
|
Analog ±15 VDC Supply |
Analog ±24 VDC Supply |
Profibus Connector
|
| 1 |
Valve Open/Close* |
Valve Open/Close* |
NC |
| 2 |
Flow Signal |
Flow Signal |
NC |
| 3 |
+15 V Supply |
24 V Supply |
RXD/TXD - P |
| 4 |
Supply Common |
Reserved |
CNTR - P |
| 5 |
-15 V Supply |
24 V Common |
DGND |
| 6 |
Setpoint Input* |
Setpoint Input* |
VP |
| 7 |
Signal Common |
Singal Common |
NC |
| 8 |
Signal Common |
Singal Common |
RXD/TXP - N |
| 9 |
Reserved |
Reserved |
NC |
| * Not applicable with mass flow meter type 579 |
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Note:
This information is subject to change without notice.
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Contact MKS Instruments by sending an email to MKS or call 800-227-8766 or 978-284-4000 (outside the USA).