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Gas Correction Factors

Thermal-based Mass Flow Controller Gas Correction Factors

Thermal-based mass flow controller gas correction factors for various gases with respect to Nitrogen. Please note that a non-linearity may exist between a Nitrogen calibration and the actual flow of process gases.

Thermal-based Mass Flow Controller Gas Correction Factors

Ionization Vacuum Gauge Gas Correction Factors

Hot cathode and cold cathode ionization gauge gas correction factors for various gases with respect to Nitrogen.

Ionization Vacuum Gauge Gas Correction Factors

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