Gas Correction Factors
Thermal-based mass flow controller gas correction factors for various gases with respect to Nitrogen. Please note that a non-linearity may exist between a Nitrogen calibration and the actual flow of process gases.
Thermal-based Mass Flow Controller Gas Correction Factors
Hot cathode and cold cathode ionization gauge gas correction factors for various gases with respect to Nitrogen.
Ionization Vacuum Gauge Gas Correction Factors
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