Residual Gas Analysis: Understanding and Using the Partial Pressure Transducer
"Understanding and Using the Partial Pressure Transducer" provides a technical overview of the quadrupole mass spectrometer residual gas analyzer (RGA), the operating principle of the RGA, sampling systems and the basics of spectrum analysis. Several examples of process monitoring and leak detection fundamentals are discussed. Lecture topics include:
- Uses of the RGA
- Principles of mass separation
- Construction of the quadrupole partial pressure transducer
- Comparison of open & closed ion sources
- Performance measures
- Inlet sampling systems
- Spectrum analysis fundamentals and aids for interpretation
- The RGA as a process monitor
- Display modes: analog, bar chart, pressure vs time, libraries, background subtraction
- Leak detection with the RGA
Participants will be exposed to a variety of exercises using the RGA, reinforcing the concepts learned during the course.
Training options for this topic:
Open-enrollment classroom training
Customized training event
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