Vacuum Instrumentation and Control
from a User's Perspective
MKS offers several educational programs. A range of topics, listed below, is available both as live training events and via web-based training. Custom training options can also be arranged.
Sharpen your knowledge of vacuum technology and instrumentation with intensive, training from MKS Instruments. We offer a convenient, on-site educational program and web-based training.
MKS training programs use modules of detailed, technical information and demonstration equipment along with full color illustrations. Each course is carefully designed to approach topics from a user's perspective, so that the information is both interesting and relevant to your job. Upon completion of a course, a certificate of achievement is awarded. "Vacuum Instrumentation and Control" is divided into three sections, covering vacuum as applied in semiconductor process applications and the control instruments that are associated with monitoring and controlling vacuum processes:
1. Vacuum Gauging Techniques
2. Thermal Mass Flow Controllers
The Audience:
Equipment engineers, process engineers, and technicians who want a better knowledge of vacuum technique and related measurement and control systems should take these courses.
Prerequisite: Participants should have some familiarity with vacuum instrumentation or the operation and maintenance of process tools.
Course Descriptions:
Vacuum Gauging Techniques
This is a detailed, practical understanding of vacuum gauge types, their operating principles, ranges of operation, sensitivities and limitations, and precautions in use. The material covers indirect gauges such as thermocouple, Pirani, convection Pirani and ionization, capacitance manometers and residual gas analyzers. The participant will gain an understanding of:
- The operating principles and characteristics of indirect and direct total pressure gauges and partial pressure analyzers
- The appropriate use of gauges as indicators, measurement devices, elements in control systems, and as calibration instruments
I. Indirect Total Pressure Gauges:
Thermocouple, Pirani, convection Pirani, hot and cold cathode ion gauges, and spinning rotor gauge
II. Direct Total Pressure:
Capacitance Manometer Development, differential and absolute manometers, ranges and outputs, accuracy _ definitions and factors, mechanical configurations, gauge isolation, and calibration using transfer standards
III. Indirect Partial Pressure:
Residual Gas Analyzers Partial pressure, uses of the RGA, principle of mass separation, factors associated with the RGA spectrum, components of the quadrupole RGA, and sampling configurations
Thermal Mass Flow Controllers
This is a working knowledge of these often misunderstood devices. Topics include descriptions of the various sensor and control valve configurations and characteristics, materials and construction considerations, characteristics and sensitivities of thermal MFCs, calibration procedures, in situ verification techniques, and practical troubleshooting techniques and guidelines. The participant will gain an understanding of:
- Construction and characteristics associated with the various sensor and valve technologies Effects of external parameters
- Effects of physical design and materials selection on performance and process compatibility
Performance terminology and measurement
- Calibration and in situ verification techniques including the use of primary and transfer standards
I. Mass Flow Defined
II. Use and Importance of Mass Flow Measurement and Control in Process Systems
III. Thermal MFC Technology Sensors, control valves, materials, and typical constructions
IV. Characteristics and Sensitivities of the Thermal MFC
V. Calibration Primary standards, transfer standards, in-situ calibration and verification
VI. Troubleshooting Techniques
Need help?
Contact MKS Instruments by sending an email or call 800-227-8766 or 978-284-4000.
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