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Contact MKS Service & Support

Product Service Offerings (PSO)
from MKS Instruments

Spares Exchange Program

A flexible and convenient spare part support program for select MKS Instruments products.

This service agreement ensures the availability of spare parts on a timely basis. Under the agreement, MKS holds a dedicated, local inventory of parts compatible with your installed base. It is always available within 24 hours of notification to supply replacements for parts used during preventive maintenance or repairs.

Features & Benefits:

Download the Spares Exchange Program brochure.


Need more help?

Contact an MKS Service Specialist by sending an email to MKS or call:

800-227-8766
978-284-4000 (outside the USA),
877-464-2789 (24/7 technical support in the USA).

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