Product Service Offerings (PSO)
from MKS Instruments

Product Upgrades, Spares, and Exchanges

Upgrades/Enhancements

Upgrades to optimize tool performance and availability
Latest high productivity technology for demanding 24/7 applications

Spares/Exchange Program

MKS is committed to supporting your spare parts needs by providing on-going value and service to you. MKS offers global spares and logistics capabilities. With significant investment in regional capabilities and spares stocking levels, allows MKS to move both support and spare parts closer to you.

Download the MKS Product Service Offerings brochure.

Need more help?

Contact an MKS Service Specialist by sending an email to MKS or call:

800-227-8766
978-284-4000 (outside the USA).