The best is getting better!
3 New HPS® Vacuum Valves from MKS Instruments

zoom

Corrosion & Ozone Resistant Compact Vacuum Valves

The Corrosion and Ozone Resistant Valve is designed for extended life in extremely harsh semiconductor or solar processes. Shielding the thin wall bellows limits bellows exposure to corrosive or reactive gases.

Learn more about Corrosion & Ozone Resistant Valves.

zoom

High Cycle Valve (HCV)

Manufactured using superior techniques and high quality materials, the High Cycle Valve is extremely durable and dependable. Its lifetime can be extended to 10,000,000 cycles, increasing system uptime and lowering maintenance cost.

Learn more about High Cycle Valves (HCV).

zoom

High Flow, High Conductance Valves (HFV)

HFVs (High Flow Valves) are high conductance vacuum valves designed for high performance where reliable isolation is needed. HFVs have a smaller profile, are lighter, lower in cost, and easier to maintain than similar valves.

Learn more about High Flow, High Conductance Valves (HFV).

Need help?

Contact an Applications Specialist by sending an email to MKS Instruments, HPS® Products, or call 303-449-9861.