TOOLweb®
Data Acquisition, Sensor Integration, & Data Analysis

Open Architecture & Connectivity

The MKS TOOLweb suite of products utilize modular, open data collection architecture which easily integrates with MKS and 3rd party sensors, instruments, and s/w applications. This unique attribute allows MKS TOOLweb™ products to be easily configured to meet virtually any data acquisition and monitoring need.

Advantages of Open Architecture

• Leverages existing investments by allowing use of legacy sensors, instrumentation, and software - MKS or third party
• Allows access to a broader range of advanced monitoring software and instrumentation
• Sensor, Instrument, Tool, and FAB level connectivity - made practical and realistic
• Effective sharing of information from tool, sensors, instruments, fab and 3rd party APC & FDC programs

The flexibility afforded by an Open Architecture solution allows for multiple Levels of Functionality

• Sensor Level: Facilitates web-enabled access to sensor data for local and remote diagnostics. Real-time, high data rate collection is achieved through dedicated, embedded Ethernet ports. Existing analog or digital sensors can also be web-enabled.
• Instrument Level: Provides APC and FDC (fault detection and classification) applications with real-time access to information from process diagnostics instruments, such as RF impedance analyzers, residual gas analyzers, FTIR exhaust monitors, and optical emissions sensors.
• Tool Level: Real-time information sharing and optimization within a single process tool setting, including sensors, process monitoring and diagnostics instruments, the fab, and 3rd party APC and FDC applications. Hardware and software required for data management, maintenance and utilities are provided.
• Fab Level: Enables data collection and sharing among multiple process tools, sensors, process monitoring and diagnostic instruments, the fab, and 3rd party APC and FDC applications. Data collection and storage, database management, web-enabled reporting, and visualization are also provided to allow evaluation of multiple data sources to monitor and control interdependent parameters.

Need more information?

Contact a TOOLweb® Specialist by sending an email to MKS or call 408-750-0300.