LIQUOZON® LoopO3 10 slm Recirculating Ozone Water Delivery System
The most compact recirculation system available.
LIQUOZON® LoopO3 Ozonated Water Delivery System is the most compact source for wet wafer processing with ozone including a pump for the recirculation loop.
The new, compact LoopO3 series was especially designed for low flow applications with ozone concentrations up to 62 ppm such as wet wafer cleaning, contaminant removal, surface conditioning, water marks removal and oxide growth. The system has an integrated recirculation pump which allows zero UPW consumption during IDLE mode and a very fast concentration control. Part of the production proven family of LIQUOZON® systems, the LoopO3 Series based on the same highly reliable ozone generating and contacting technology.
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