LIQUOZON® Single Compact 20 slm Ozone Water Delivery System
The LIQUOZON® Single, the most compact member of the MKS LIQUOZON® family of ultra-pure ozonated water (DIO3 water) generators, was specifically designed to supply DIO3 water to single-wafer cleaning tools. The LIQUOZON® Single is a compact, self-contained unit that provides ultra-pure ozonated water with a high and accurate ozone concentration at a constant delivery pressure. The unit delivers DIO3 water with ozone concentrations between 5 and 95 ppm at flow rates between 0.5 and 20 L/min and at a pressure of up to 2.5 bar (gauge) (0.25 MPa).
The components of LIQUOZON® Single are an ozone gas generator, an ozone contactor, a dissolved ozone analyzer, and an ozone gas destruct unit, all integrated in a compact unit measuring only 40 x 50 x 120 cm (16 x 20 x 48 inches), providing an outstanding performance density in relation to its footprint. The unit complies with all industry standards such as CE and SEMI S2.
Advantages of LIQUOZON® Single include simple plug-and-play installation, exceptional reliability (MTBF >20,000 hours), extremely low maintenance requirements, and low operation cost.
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