General Purpose Metal-Sealed 10 sccm to 20 slm Mass Flow Meter

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179c mass flow meter & 1179c mass flow controller, 10-20,000 sccm

Overview

The 179 is an all-metal mass flow meter designed to measure the flow of gases in a wide variety of applications. 179 Mass-Flo® meters are available with Full Scales from 10 sccm to 20 slm, providing fast, repeatable flow metering to as low as 0.1 sccm. The 179 is a direct form-fit-function replacement for the most common MFMs on the market today.

Flow ranges from 10 sccm to 20 slm
Patented sensor design provides exceptional zero stability
Percent of Full Scale accuracy for analog configurations

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Products

Compare	Description	Compatibility	rankScore	Full Scale Flow Range	Fitting Type	Analog I/O Connector	Availability	Price
179C01311CR3BM Mass Flow Meter, 10 sccm, 4 VCR Male, DB15, Metal Seal $1,103 5 Weeks	179C01311CR3BM Mass Flow Meter, 10 sccm, 4 VCR Male, DB15, Metal Seal	UNIVERSAL	1.0	10 sccm	4 VCR male	15-pin D-sub	5 Weeks	$1,103
179C01311CS3BM Mass Flow Meter, 10 sccm, 0.25 in. Tube, DB15, Metal Seal $1,103 5 Weeks	179C01311CS3BM Mass Flow Meter, 10 sccm, 0.25 in. Tube, DB15, Metal Seal	UNIVERSAL	1.0	10 sccm	0.25 in. tube	15-pin D-sub	5 Weeks	$1,103
179C01312CR3BM Mass Flow Meter, 100 sccm, 4 VCR Male, DB15, Metal Seal $1,103 5 Weeks	179C01312CR3BM Mass Flow Meter, 100 sccm, 4 VCR Male, DB15, Metal Seal	UNIVERSAL	1.0	100 sccm	4 VCR male	15-pin D-sub	5 Weeks	$1,103
179C01312CS3BM Mass Flow Meter, 100 sccm, 0.25 in. Tube, DB15, Metal Seal $1,103 5 Weeks	179C01312CS3BM Mass Flow Meter, 100 sccm, 0.25 in. Tube, DB15, Metal Seal	UNIVERSAL	1.0	100 sccm	0.25 in. tube	15-pin D-sub	5 Weeks	$1,103
179C01313CR3BM Mass Flow Meter, 1000 sccm, 4 VCR Male, DB15, Metal Seal $1,103 5 Weeks	179C01313CR3BM Mass Flow Meter, 1000 sccm, 4 VCR Male, DB15, Metal Seal	UNIVERSAL	1.0	1000 sccm	4 VCR male	15-pin D-sub	5 Weeks	$1,103
179C01313CS3BM Mass Flow Meter, 1000 sccm, 0.25 in. Tube, DB15, Metal Seal $1,103 5 Weeks	179C01313CS3BM Mass Flow Meter, 1000 sccm, 0.25 in. Tube, DB15, Metal Seal	UNIVERSAL	1.0	1000 sccm	0.25 in. tube	15-pin D-sub	5 Weeks	$1,103
179C01314CR3BM Mass Flow Meter, 10,000 sccm, 4 VCR Male, DB15, Metal Seal $1,103 5 Weeks	179C01314CR3BM Mass Flow Meter, 10,000 sccm, 4 VCR Male, DB15, Metal Seal	UNIVERSAL	1.0	10000 sccm	4 VCR male	15-pin D-sub	5 Weeks	$1,103
179C01314CS3BM Mass Flow Meter, 10,000 sccm, 0.25 in. Tube, DB15, Metal Seal $1,103 5 Weeks	179C01314CS3BM Mass Flow Meter, 10,000 sccm, 0.25 in. Tube, DB15, Metal Seal	UNIVERSAL	1.0	10000 sccm	0.25 in. tube	15-pin D-sub	5 Weeks	$1,103
179C01321CR3BM Mass Flow Meter, 20 sccm, 4 VCR Male, DB15, Metal Seal $1,103 5 Weeks	179C01321CR3BM Mass Flow Meter, 20 sccm, 4 VCR Male, DB15, Metal Seal	UNIVERSAL	1.0	20 sccm	4 VCR male	15-pin D-sub	5 Weeks	$1,103
179C01321CS3BM Mass Flow Meter, 20 sccm, 0.25 in. Tube, DB15, Metal Seal $1,103 5 Weeks	179C01321CS3BM Mass Flow Meter, 20 sccm, 0.25 in. Tube, DB15, Metal Seal	UNIVERSAL	1.0	20 sccm	0.25 in. tube	15-pin D-sub	5 Weeks	$1,103
179C01322CR3BM Mass Flow Meter, 200 sccm, 4 VCR Male, DB15, Metal Seal $1,103 5 Weeks	179C01322CR3BM Mass Flow Meter, 200 sccm, 4 VCR Male, DB15, Metal Seal	UNIVERSAL	1.0	200 sccm	4 VCR male	15-pin D-sub	5 Weeks	$1,103
179C01322CS3BM Mass Flow Meter, 200 sccm, 0.25 in. Tube, DB15, Metal Seal $1,103 5 Weeks	179C01322CS3BM Mass Flow Meter, 200 sccm, 0.25 in. Tube, DB15, Metal Seal	UNIVERSAL	1.0	200 sccm	0.25 in. tube	15-pin D-sub	5 Weeks	$1,103
179C01323CR3BM Mass Flow Meter, 2,000 sccm, 4 VCR Male, DB15, Metal Seal $1,103 5 Weeks	179C01323CR3BM Mass Flow Meter, 2,000 sccm, 4 VCR Male, DB15, Metal Seal	UNIVERSAL	1.0	2000 sccm	4 VCR male	15-pin D-sub	5 Weeks	$1,103
179C01323CS3BM Mass Flow Meter, Metal Seal, 2,000 sccm, 0.25 in. Tube $1,103 5 Weeks	179C01323CS3BM Mass Flow Meter, Metal Seal, 2,000 sccm, 0.25 in. Tube	UNIVERSAL	1.0	2000 sccm	0.25 in. tube	15-pin D-sub	5 Weeks	$1,103
179C01324CR3BM Mass Flow Meter, 20,000 sccm, 4 VCR Male, DB15, Metal Seal $1,103 5 Weeks	179C01324CR3BM Mass Flow Meter, 20,000 sccm, 4 VCR Male, DB15, Metal Seal	UNIVERSAL	1.0	20000 sccm	4 VCR male	15-pin D-sub	5 Weeks	$1,103
179C01324CS3BM Mass Flow Meter, 20,000 sccm, 0.25 in. Tube, DB15, Metal Seal $1,103 5 Weeks	179C01324CS3BM Mass Flow Meter, 20,000 sccm, 0.25 in. Tube, DB15, Metal Seal	UNIVERSAL	1.0	20000 sccm	0.25 in. tube	15-pin D-sub	5 Weeks	$1,103
179C01351CR3BM Mass Flow Meter, 50 sccm, 4 VCR Male, DB15, Metal Seal $1,103 5 Weeks	179C01351CR3BM Mass Flow Meter, 50 sccm, 4 VCR Male, DB15, Metal Seal	UNIVERSAL	1.0	50 sccm	4 VCR male	15-pin D-sub	5 Weeks	$1,103
179C01351CS3BM Mass Flow Meter, 50 sccm, 0.25 in. Tube, DB15, Metal Seal $1,103 5 Weeks	179C01351CS3BM Mass Flow Meter, 50 sccm, 0.25 in. Tube, DB15, Metal Seal	UNIVERSAL	1.0	50 sccm	0.25 in. tube	15-pin D-sub	5 Weeks	$1,103
179C01352CR3BM Mass Flow Meter, 500 sccm, 4 VCR Male, DB15, Metal Seal $1,103 5 Weeks	179C01352CR3BM Mass Flow Meter, 500 sccm, 4 VCR Male, DB15, Metal Seal	UNIVERSAL	1.0	500 sccm	4 VCR male	15-pin D-sub	5 Weeks	$1,103
179C01352CS3BM Mass Flow Meter, 500 sccm, 0.25 in. Tube, DB15, Metal Seal $1,103 5 Weeks	179C01352CS3BM Mass Flow Meter, 500 sccm, 0.25 in. Tube, DB15, Metal Seal	UNIVERSAL	1.0	500 sccm	0.25 in. tube	15-pin D-sub	5 Weeks	$1,103
179C01353CR3BM Mass Flow Meter, 5,000 sccm, 4 VCR Male, DB15, Metal Seal $1,103 5 Weeks	179C01353CR3BM Mass Flow Meter, 5,000 sccm, 4 VCR Male, DB15, Metal Seal	UNIVERSAL	1.0	5000 sccm	4 VCR male	15-pin D-sub	5 Weeks	$1,103
179C01353CS3BM Mass Flow Meter, 5,000 sccm, 0.25 in. Tube, DB15, Metal Seal $1,103 5 Weeks	179C01353CS3BM Mass Flow Meter, 5,000 sccm, 0.25 in. Tube, DB15, Metal Seal	UNIVERSAL	1.0	5000 sccm	0.25 in. tube	15-pin D-sub	5 Weeks	$1,103

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Configuration Options

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	Description
	179C Mass Flow Meter, Metal Seal, 10 - 20,000 sccm

Specifications

Type

Mass Flow Meter
Full Scale Flow Range

10, 20, 50, 100, 200, 500, 1000, 2000, 5000, 10000, 20000 sccm (N2 equivalent)
Fitting Type

Swagelok® 4 VCR®, Swagelok 4 VCO®, ¼ inch Swagelok®
Analog I/O Connector

9-pin or 15-pin Type "D"
Maximum Inlet Pressure

500 psig
Normal Operating Pressure Differential

10 Torr at 10 to 20,000 sccm (with atmospheric pressure at the MFM outlet)
Typical Accuracy

±1.0% of Full Scale
Repeatability

±0.2% of Full Scale
Resolution

0.1% of Full Scale

Zero Temperature Coefficient

<0.05% of Full Scale/°C
Span Temperature Coefficient

<0.08% of Reading./°C
Pressure Coefficient

<0.02% of Reading/psi
Warm-up Time

2 minutes
Operating Temperature

0° to 50°C
Power Requirements

±15 VDC (150 mA start-up, 50 mA steady-state)
Wetted Materials

316L S.S.
External Leak Integrity

< 1 x 10^-9
Compliance

CE

Specifications

Type

Mass Flow Meter
Full Scale Flow Range

10, 20, 50, 100, 200, 500, 1000, 2000, 5000, 10000, 20000 sccm (N2 equivalent)
Fitting Type

Swagelok® 4 VCR®, Swagelok 4 VCO®, ¼ inch Swagelok®
Analog I/O Connector

9-pin or 15-pin Type "D"
Maximum Inlet Pressure

500 psig
Normal Operating Pressure Differential

10 Torr at 10 to 20,000 sccm (with atmospheric pressure at the MFM outlet)
Typical Accuracy

±1.0% of Full Scale
Repeatability

±0.2% of Full Scale
Resolution

0.1% of Full Scale

Zero Temperature Coefficient

<0.05% of Full Scale/°C
Span Temperature Coefficient

<0.08% of Reading./°C
Pressure Coefficient

<0.02% of Reading/psi
Warm-up Time

2 minutes
Operating Temperature

0° to 50°C
Power Requirements

±15 VDC (150 mA start-up, 50 mA steady-state)
Wetted Materials

316L S.S.
External Leak Integrity

< 1 x 10^-9
Compliance

CE

Features

Direct Form-Fit-Function Replacement

The 179C is a direct form-fit-function replacement for the most common MFM’s on the market today. The standard 3-inch footprint enables the 179C to drop directly into the same space without modifying existing gas lines. Electrical connectors are the same Type “D” connectors, with similar pin-outs, signals, and functions as their industry counterparts. The 179C is compatible with mass flow controller (MFC) power supply and display electronics from MKS or other manufacturers.

Performance and Reliability

Performance and reliability have been designed into the 179C, and ensured through rigorous MTBF analysis and extensive STRIFE testing, which includes humidity soak and temperature cycling. The 179C MFM also complies with European CE Mark requirements. Zero and span drift are minimal with MKS’ new patented sensor, as shown by the graph below. As a statement of our confidence in the performance of the 179C, it carries a two-year warranty

Features

Direct Form-Fit-Function Replacement

Performance and Reliability

Accessories

Description	Compatibility	Avail.	Price
CB147-12-10 Cable, Mass Flow Controller, DB9, 10 ft.	UNIVERSAL	15 Weeks	$83
CB147-1-10 Cable, Mass Flow Controller, PR4000, 146, 167, 186 or 647 Controllers, DB15, 10 ft.	UNIVERSAL	8 Weeks	$101
CB259-5-10 Cable, Mass Flow Controller, 246, 247 or 660 Controllers, DB15, 10 ft.	UNIVERSAL	8 Weeks	$90
100016744 Cable, Mass Flow Controller, 946 Controller, DB15 to HD15, 10 ft.	UNIVERSAL	1 Week	$94
100019087 Cable, Mass Flow Controller, 946 Controller, DB9 to HD15, 10 ft.	UNIVERSAL	10 Weeks	$105
100016745 Cable, Mass Flow Controller, 946 Controller, DB15 to HD15, 25 ft.	UNIVERSAL	1 Week	$144
100016746 Cable, Mass Flow Controller, 946 Controller, DB15 to HD15, 50 ft.	UNIVERSAL	8 Weeks	$249
RCBDMFC-1-10 Cable, Mass Flow Controller, 246, 247 or 660 Controllers, RoHS, DB15, 10 ft.	UNIVERSAL	8 Weeks	$130
100019089 Mass Flow Controller Cable, 946 Controller, DB9 to HD15, 50 ft.	UNIVERSAL	1 Week	$462
100019088 Cable, Mass Flow Controller, 946 Controller, DB9 to HD15, 25 ft.	UNIVERSAL	8 Weeks	$168
RCBDMFC-3-10 Cable, Mass Flow Controller, RoHS, DB9, 10 ft.	UNIVERSAL	8 Weeks	$211
RCBDMFC-4-10 Cable, Mass Flow Controller, PR4000, 146, 167, 186 or 647 Controllers, RoHS, DB15, 10 ft.	UNIVERSAL	8 Weeks	$157
RCB147-7-10 Mass Flow Meter Cable, PR4000 Controller to 20-pin Card Edge Meters, 10 ft.	UNIVERSAL	Contact Us
RCB147-12-10 Mass Flow Meter Cable, PR4000 Controller to DB9 Mass Flow Meters, 10 ft.	UNIVERSAL	Contact Us
RCB147-1-10 Mass Flow Meter Cable, PR4000 Controller to DB15 Mass Flow Meters, 10 ft.	UNIVERSAL	8 Weeks	$212