Paragon® 8.0 slm NF3 Flow Intelligent Remote Plasma Source

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Overview

For cleaning CVD and ALD/ALE process chambers, the Paragon remote plasma source is designed for high gas dissociation rates (> 95%) of NF₃ with gas flows up to 8 slm and pressures up to 10 Torr. This leading-edge performance translates into increased process throughput and repeatable process results. The Paragon design incorporates a proprietary plasma block design with a Plasma Electrolytic Oxidation coating for low particle, long block life that delivers lower cost of ownership.

Up to 8 slm NF flow, in a compact size enables faster clean times
Best in Class dissociation (>95%) for efficient uniform cleaning results
EtherCAT intelligent data reporting for faster, tighter device operation
Compatible with O₂ and NF₃ mixed gases
Proprietary PEO plasma block design offers greater process performance

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Products

		Compare	Description	Compatibility	sortOrder	rankScore	ranking	Drawings, CAD & Specs		Gas Supply During Ignition	Type	Gas Flow	Gas Supply Post Ignition	Availability	Featured Item	Price		Brand
		AX7710MKS-01 Remote Plasma Source, 8 slm, NF3 Flow, Paragon Contact Us	AX7710MKS-01 Remote Plasma Source, 8 slm, NF3 Flow, Paragon	UNIVERSAL	0.0	1.0	0.0		0.0	1 - 8 Torr @ 1 - 5 slm for Ar	Remote Plasma Source	8 slm, NF3 Flow	1 - 10 Torr @ 1 - 8 slm	Contact Us

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Specifications

Type

AX7710MKS-01 Remote Plasma Source
Gas Supply During Ignition

100% Ar for ignition only
Gas Supply Post Ignition

Up to 8 slm of NF3 (post ignition NF3 can be added and the Ar removed)
NF3 Operation Reactant Output

>95% dissociation across operating space, 1-10T, 1-8 slm
O2: NF3 Mix Operation Reactant Output

>95% dissociation across operating space, 1-10T, 1-8 slm
Process Gas Feed & Exhaust

Inlet Gas Connection KF40
Outlet Gas Connection KF50
Duty Cycle

2 sec on time minimum to 100% (process times >45 minutes)
Gas Flow

During Ignition: 1 to 8 Torr @ 1 to 5 slm for Ar
Post Ignition: 1 to 10 Torr @ 1 to 8 slm for NF3

Wetted Materials

PEO coating, 6061-T6 Aluminum, Chemraz®, Alumina
Operating Temperature

Ambient air 40°C max.
Cooling Water Required

2.0 gpm, <30°C
Control Interface

EtherCAT and analog I/O 25 pin D
Power Requirements

208 VAC, 50/60 Hz, 35A, 3 phase (50A Service recommended)
Dimensions

18.40 x 9.50 x 10.50 inches (467 x 241 x 267 mm nominal)
Weight

54 lb. (24.5 Kg)
Compliance

CE, SEMI F47, SEMI S2 (includes S8, S10, S14 assessments), UL 61010-1, CAN/CSA-61010-1

Specifications

Type

AX7710MKS-01 Remote Plasma Source
Gas Supply During Ignition

100% Ar for ignition only
Gas Supply Post Ignition

Up to 8 slm of NF3 (post ignition NF3 can be added and the Ar removed)
NF3 Operation Reactant Output

>95% dissociation across operating space, 1-10T, 1-8 slm
O2: NF3 Mix Operation Reactant Output

>95% dissociation across operating space, 1-10T, 1-8 slm
Process Gas Feed & Exhaust

Inlet Gas Connection KF40
Outlet Gas Connection KF50
Duty Cycle

2 sec on time minimum to 100% (process times >45 minutes)
Gas Flow

During Ignition: 1 to 8 Torr @ 1 to 5 slm for Ar
Post Ignition: 1 to 10 Torr @ 1 to 8 slm for NF3

Wetted Materials

PEO coating, 6061-T6 Aluminum, Chemraz®, Alumina
Operating Temperature

Ambient air 40°C max.
Cooling Water Required

2.0 gpm, <30°C
Control Interface

EtherCAT and analog I/O 25 pin D
Power Requirements

208 VAC, 50/60 Hz, 35A, 3 phase (50A Service recommended)
Dimensions

18.40 x 9.50 x 10.50 inches (467 x 241 x 267 mm nominal)
Weight

54 lb. (24.5 Kg)
Compliance

CE, SEMI F47, SEMI S2 (includes S8, S10, S14 assessments), UL 61010-1, CAN/CSA-61010-1

Features

Analog or EtherCAT Control

The Paragon remote plasma source is available with both analog and EtherCAT® communication ports. EtherCAT can be used for direct control of the Paragon, or in combination with the analog port, as a data monitoring port only. The Paragon streams intelligent data sets to the tool or fab database to monitor or modify operating parameters to keep process tools running at peak efficiency and to support diagnostics (APC, FDC) applications.