Flow Measurement, Control & Verification

Thermal & Pressure-based Mass Flow Controllers & Meters

In Situ Flow Verifiers

Flow Ratio Controllers

Flow-related Products

IP66-rated, Multi-gas, Multi-range Metal-sealed Mass Flow Controllers for Industrial Environments

photo - IM50A IP66-rated, Metal-sealed, Digital Mass Flow Controller - click to enlarge

The IM50A Mass Flow Controller & Mass Flow Meter are a general purpose, metal-sealed MFC with flow control capability from 5 sccm to 50 slm Full Scale, N2 equivalent. It incorporates the latest in digital flow control electronics and a proven, patented thermal sensor and mechanical design.

The IM50A is a digitally-controlled MFC offered with analog (0 to 5 VDC or 4-20 mA) or a variety of digital (RS485, Profibus® and DeviceNet™) I/O. The digital control electronics utilize the latest in MKS control algorithms for fast and repeatable response to setpoint throughout the control range. Typical response times are on the order of 500 milliseconds. A digital calibration (included) yields 1% of setpoint accuracy on the calibration gas.

The IM50A uses the standard 3-inch footprint commonly used by mass flow controllers in the 5 sccm to 50 slm flow rate range for use without modifying existing gas lines. The IM50A metal-sealed and electropolished internal surface finish is suited for high purity process applications. The IM50A is also available as a mass flow meter (not electropolished).

Features & Benefits:

  • IP66-rated enclosure protects against ingress of water and dust from harsh environments
  • Patented thermal sensor design provides exceptional zero stability
  • Percent of setpoint accuracy (calibration gas) enables precise process control
  • Available in a wide variety of analog & digital I/O interfaces for custom applications
  • Embedded user interface to easily change range & user gas reduces inventory requirements and monitor performance


The IM50A supports a wide variety of applications in harsh environments where resistance to liquid or dust ingress are critical. The IM50A meets these requirements with an IP66 rated enclosure design.

Documents & Downloads

IM50A data sheet
IM50A specifications
IM50A dimensional drawing
IM50A pin-outs

SmartPhone version of this page

No other documents or downloads are available for this product.


Use this form to purchase now or to request a quote.
Enter a quantity for a specific configuration and then click on "add to cart" at the bottom of this table.

Part NumberPriceQTY
IM50AQuote Only


Cables for Flow Control Products

No other accessories are available for this product.

MKS Instruments Logo MKS Instruments - Global Headquarters
2 Tech Drive, Suite 201, Andover, Massachusetts 01810, USA
Tel: 978-645-5500, Toll-Free: 800-227-8766

Copyright MKS Instruments, Inc. unless noted otherwise.
Specifications are subject to change without notice.

Need help?

Contact an Applications Specialist by sending an email to MKS Instruments, or call 978-975-2350.

万机仪器 (上海) 有限公司  MKS Instruments, United Kindom  MKS Instruments, Taiwan  MKS Instruments Deutschland GmbH  日本エム・ケー・エス株式会社 MKS Instruments  MKS Instruments, France  MKS Instruments, Korea  MKS Denmark ApS  español MKS Logo Shop     |      Export Notice     |      Privacy Policy     |      Legal     |      Site Map

mksinst.mobi - MKS Instruments for smart phones.
Add your email address to our mailing list.
© 2014 by MKS Instruments