General Purpose Multi-gas, Multi-range Elastomer-sealed Mass Flow Controller for Flow Rates up to 50 slm

The GE50A digitally-controlled mass flow controller is available with either RS485, Profibus™, EtherCAT, or DeviceNet™ I/O. The digital control electronics utilize the latest MKS control algorithms for fast and repeatable response to setpoint throughout the device control range. Typical response times are on the order of 500 milliseconds. Digital calibration yields 1% of setpoint accuracy on the calibration gas. I/O protocols are designed to allow the GE50A to easily replace RS485 and DeviceNet versions of the MKS 1179A MFC with minor coding.

A standard 3-inch footprint enables its use without modifying existing gas line configurations. The GE50A incorporates few elastomers - only one external elastomer seal and elastomer valve plug. All wetted surfaces are metal. The GE50A comes standard with Viton® seals or optional Buna, Neoprene® or Kalrez® to support different gas requirements.

Features & Benefits:

  • Patented thermal sensor design for exceptional zero stability
  • Percent of setpoint accuracy enables precise process control
  • Embedded user interface - easily change device range & user gas, monitor & measure performance


GE50A is a general purpose MFC suited for a wide variety of applications requiring flow control capability from 10 sccm to 50 slm Full Scale, N2 equivalent.

Need help?

Contact an Applications Specialist by sending an email to MKS Instruments, or call 978-645-5500.