Compare Description Drawings, CAD & Specs Full Scale Flow Range Fitting Type Seal Material Analog Connector Availability Price
GE50A013101RMV020
$1,847
14 Weeks
 GE50A013101RMV020 10 sccm 4 VCR male Viton 15-pin D-sub (tied grounds)
14 Weeks
 $1,847
GE50A013102RMV020
$1,847
14 Weeks
 GE50A013102RMV020 100 sccm 4 VCR male Viton 15-pin D-sub (tied grounds)
14 Weeks
 $1,847
GE50A013102SMV020
$1,847
Contact Us
 GE50A013102SMV020 100 sccm 0.25 in. Swagelok-style Viton 15-pin D-sub (tied grounds)
Contact Us
 $1,847
GE50A013103RMV020
$1,847
14 Weeks
 GE50A013103RMV020 1000 sccm 4 VCR male Viton 15-pin D-sub (tied grounds)
14 Weeks
 $1,847
GE50A013103SMV020
$1,847
Contact Us
 GE50A013103SMV020 1000 sccm 0.25 in. Swagelok-style Viton 15-pin D-sub (tied grounds)
Contact Us
 $1,847
GE50A013201RMV020
$1,847
14 Weeks
 GE50A013201RMV020 20 sccm 4 VCR male Viton 15-pin D-sub (tied grounds)
14 Weeks
 $1,847
GE50A013202RMV020
$1,847
14 Weeks
 GE50A013202RMV020 200 sccm 4 VCR male Viton 15-pin D-sub (tied grounds)
14 Weeks
 $1,847
GE50A013203RMV020
$1,847
14 Weeks
 GE50A013203RMV020 2000 sccm 4 VCR male Viton 15-pin D-sub (tied grounds)
14 Weeks
 $1,847
GE50A013204RMV020
$1,847
Contact Us
 GE50A013204RMV020 20000 sccm 4 VCR male Viton 15-pin D-sub (tied grounds)
Contact Us
 $1,847
GE50A013204SMV020
$1,847
Contact Us
 GE50A013204SMV020 20000 sccm 0.25 in. Swagelok-style Viton 15-pin D-sub (tied grounds)
Contact Us
 $1,847
GE50A013501RMV020
$1,847
14 Weeks
 GE50A013501RMV020 50 sccm 4VCR Male Viton 15-pin D-sub (tied grounds)
14 Weeks
 $1,847
GE50A013502RMV020
$1,847
14 Weeks
 GE50A013502RMV020 500 sccm 4 VCR male Viton 15-pin D-sub (tied grounds)
14 Weeks
 $1,847
GE50A013503RMV020
$1,847
14 Weeks
 GE50A013503RMV020 5000 sccm 4 VCR male Viton 15-pin D-sub (tied grounds)
14 Weeks
 $1,847

Configuration Options

 Show All Configuration Options
Description
GE50A Mass Flow Controller, 5 sccm to 50 slm, See Available Product Options

Specifications

  • Type
    Mass Flow Controller
  • Full Scale Flow Range
    5 - 50,000 sccm
  • Control Range
    2% to 100% of Full Scale
  • Seal Material
    Viton, Buna-N, Neoprene, or Kalrez
  • Analog Connector
    9-pin or 15-pin D-subminiture
  • Maximum Inlet Pressure
    150 psig
  • Normal Operating Pressure Differential
    10 to 5000 sccm; 10 to 40 psid, 10000 to 20000 sccm; 15 to 40 psid, 30000 to 50000 sccm; 25 to 40 psid
  • Proof Pressure
    1000 psig
  • Burst Pressure
    1500 psig
  • Typical Accuracy
    ±1% of set point for 20 to 100% Full Scale, ±0.2% of Full Scale for 2 to 20% Full Scale
  • Repeatability
    ±0.3% of Reading
  • Resolution
    0.1% of Full Scale
  • Zero Temperature Coefficient
    <0.05% of Full Scale/°C
  • Span Temperature Coefficient
    <0.08% of Reading/°C
  • Inlet Pressure Coefficient
    <0.02% of Reading/psi
  • Typical Settling Time
    <750 msec, typical above 5% Full Scale
  • Warm-up Time
    30 minutes
  • Operating Temperature
    10°C to 50°C
  • Storage Humidity
    0 to 95% Relative Humidity, non-condensing
  • Storage Temperature
    -20° to 80°C
  • External Leak Integrity
    <1 x 10-09 (scc/sec He)
  • Leak Integrity Through Closed Valve
    Up to 10K valve <0.1% of FS at 40 psig to atmosphere, 20K - 50K valve <1.0% of FS at 40 psig to atmosphere
  • Wetted Materials
    316L S.S. VAR, 316 S.S., Elgiloy®, Nickel
  • Surface Finish
    16µ inch average Ra
  • Weight
    3 lbs (1.4 kg)
  • Compliance
    CE

Features

Communication Options/Specifications

Digital I/O DeviceNet™ RS485 Profibus® EtherCAT® PROFINET®
Input Power Required +11 to +25 VDC per (<2 watts) +15 to +24 VDC (<2 watts) +15 to +24 VDC (<2 watts) +24 VDC (<3 watts) +24 VDC (<3 watts)
Connector 5 pin micro connector (power and comm.) 9 pin Type D male (power and comm.) 9 pin Type D male (power)
9 pin Type D female (comm.)		 2 x RJ-45 (comm.) male, M8 male,
5 pin (power)		 2 x RJ-45 (comm.) male, M8 male,
5 pin (power)
Data Rate Switch/Selection 4 positions: 125, 250, 500K (Default)
(programmable over network)		 No switch Set data rate via RS485 No switch Set data rate via Profibus No switch No switch
Comm. Rate(s) 125 Kbps; 250 Kbps; 500 Kbps 9.6 Kbps; 19.2 Kbps 38.4 Kbps 9.6 Kbps to 12 Mbps 100 Mbps 100 Mbps
MAC ID Switches/Addresses 2 switches, 10 positions; 0,0 to 6,3 1 to 254 Set address over RS485 Station Addresses 0,0 to 9,9 2 switches, 10 positions 3 switches, 16 positions N/A
Network Size Up to 64 nodes Up to 32 nodes Up to 99 nodes Up to 4095 nodes N/A
Visual Indicators LED Network (green/red)
LED Module (green/red)		 LED Comm (yellow)
LED Error (red)		 LED Comm (green/red)
LED Error (green/red)		 LED Power (green)
LED Run (green)
LED Error (red)
LED Comm (green)		 LED Maint (amber)
LED BUS Fault (red)
LED Ready (green)
LED Sys Fault (red)
Compliance CE CE CE CE CE

Wide Choice of Digital and Analog Interfaces

The GE50A digitally controlled MFC is available with either analog or digital I/O. The digital control electronics utilize the latest in MKS control algorithms providing fast and repeatable response to set point throughout the device control range. Typical response times are on the order of 500 milliseconds. The GE50A’s analog and digital I/O can easily be used to replace those same I/O types of the 1179A MFCs. All GE50As include Modbus as an available secondary I/O (excludes PROFINET® and EtherCAT®).

Standard 3 inch Footprint

The GE50A utilizes the standard 3-inch footprint most often used by MFCs in the 5 sccm to 50 slm flow rate range enabling its use without the need to modify existing gas line configurations.

All Metal Wetted Surfaces

The design of the GE50A incorporates a minimal use of elastomers. There is only one external elastomer seal and elastomer valve plug. Otherwise, all wetted surfaces are of metal. The GE50A comes standard with Viton® seals along with options for Buna, Neoprene®, EPMD or Kalrez® allowing for the device’s use with gases requiring one of these alternatives

Percent of Setpoint Accuracy

Included digital calibration yields 1% of set point accuracy with N2 calibration gas for 20 to 100% of the full scale flow range.  Set point accuracy enables precise process control vs accuracy stated relative to full scale.  For mass flow rates of 2 to 20% full scale the accuracy is ±0.2% of full scale.

Embedded User Interface

An embedded user interface provides the ability to easily change device range and user gas which reduces inventory requirements. You can also monitor MFC functionality and collect performance data in-situ.

Patented Thermal Sensor

A well proven, patented thermal sensor design provides exceptional zero stability. US Patent No 5461913.

Mass Flow Controller Repair, Calibration & Evaluation:

MKS Service Solutions provide customers access to MKS certified repairs, original design engineers, complete product testing with original specifications found at no other repair center in the world. Our services testing often leads to predicting potential future issues which leads to equipment longevity.

Learn more about MKS Service Solutions here

Download the "MKS Service Solutions" brochure

Resources

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