elite™ 13.56 MHz RF Plasma Generators

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Overview

The elite™ Series of RF plasma generators provides state-of-the art technology in a compact air-cooled package. The elite is designed with high speed closed loop control, a class E RF deck and a switching modulator for superior output performance. The elite design utilizes a single printed circuit board assembly for the full rack product virtually eliminating all internal wires and connectors and thereby providing the highest reliability available.

Air cooled for lower facilities cost - does not require connection to factory cooling loop
High efficiency design, DC to RF efficiency of >85% for low power consumption
Compact half rack enclosure enables direct tool mounting
Integrated single board design eliminates cables and connectors

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Products

Compare	Description	Compatibility	rankScore	Frequency	Dynamic Power Range	Interface	Availability
ELITE-300HA-01 RF Plasma Generator, 300 W, 13.56 MHz, 25-pin Analog Interface, Half Rack Contact Us	ELITE-300HA-01 RF Plasma Generator, 300 W, 13.56 MHz, 25-pin Analog Interface, Half Rack	UNIVERSAL	1.0	13.56 MHz ±0.005%	1 - 300 W	25 pin Analog, RS232	Contact Us
ELITE-300HD-01 RF Plasma Generator, 300 W, 13.56 MHz, DeviceNet & Analog, Half Rack Contact Us	ELITE-300HD-01 RF Plasma Generator, 300 W, 13.56 MHz, DeviceNet & Analog, Half Rack	UNIVERSAL	1.0	13.56 MHz ±0.005%	1 - 300 W	DeviceNet, 25 pin Analog, RS232	Contact Us
ELITE-600FD-01 RF Plasma Generator, 600 W, 13.56 MHz, DeviceNet & Analog, Full Rack Contact Us	ELITE-600FD-01 RF Plasma Generator, 600 W, 13.56 MHz, DeviceNet & Analog, Full Rack	UNIVERSAL	1.0	13.56 MHz ±0.005%	1 - 600 W	DeviceNet, 25 pin Analog, RS232	Contact Us
ELITE-600HA-01 RF Plasma Generator, 600 W, 13.56 MHz, 25-pin Analog Interface, Half Rack Contact Us	ELITE-600HA-01 RF Plasma Generator, 600 W, 13.56 MHz, 25-pin Analog Interface, Half Rack	UNIVERSAL	1.0	13.56 MHz ±0.005%	1 - 600 W	25 pin Analog, RS232	Contact Us
ELITE-600HD-01 RF Plasma Generator, 600 W, 13.56 MHz, DeviceNet & Analog, Half Rack Contact Us	ELITE-600HD-01 RF Plasma Generator, 600 W, 13.56 MHz, DeviceNet & Analog, Half Rack	UNIVERSAL	1.0	13.56 MHz ±0.005%	1 - 600 W	DeviceNet, 25 pin Analog, RS232	Contact Us
ELITE-600HP-01 RF Plasma Generator, 600 W, 13.56 MHz, Profibus Interface, Half Rack Contact Us	ELITE-600HP-01 RF Plasma Generator, 600 W, 13.56 MHz, Profibus Interface, Half Rack	UNIVERSAL	1.0	13.56 MHz ±0.005%	1 - 600 W	Profibus, RS232	Contact Us
ELITE-750FD-01 RF Plasma Generator, 750 W, 13.56 MHz, DeviceNet & Analog, Full Rack Contact Us	ELITE-750FD-01 RF Plasma Generator, 750 W, 13.56 MHz, DeviceNet & Analog, Full Rack	UNIVERSAL	1.0	13.56 MHz ±0.005%	1 - 750 W	DeviceNet, 25 pin Analog, RS232	Contact Us

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Specifications

Type

elite 13.56 MHz RF Plasma Generators
Frequency

13.56 MHz
Accuracy

±0.005%
Load Impedance Range

200 - 750 W, depending on model
Harmonic Output & Distortion

-20 to -30 dBc
Harmonic Output

-30 dBc
Input AC Power

Single phase, 110VAC - 253VAC, 50Hz / 60Hz
RF Connector

Type N
Remote Digital Interface

RS-232 via DB9F
Analog Interface

25-pin DB25F
Cooling

Air-cooled
Operating Temperature

5 - 40°C
Set Point Response Time

<10ms (analog)

Power Switch

Front Panel Switch
AC Input Connector

IEC Compliant Inlet
LED Indicators

PWR and STAT on rear panel
Watts Nominal into 1.1:1

elite 750: 750 W
elite 600: 600 W
elite 300: 300 W
Watts Nominal into 1.5:1

elite 750: 600 W
elite 600: 600 W
elite 300: 300 W
Watts Nominal into 2:1

elite 750: 486 W
elite 600: 486 W
elite 300: 300 W
Watts Nominal into 3:1

elite 750: 384 W
elite 600: 384 W
elite 300: 300 W
Watts Nominal into inf:1

elite 750: 100 W
elite 600: 200 W
elite 300: 200 W
Rack Size

elite 750 & 600: 2U, full rack
Dimensions

elite 750 & 600: 17 in. W x 15 in. D x 3.5 in. H
Weight

9.2 kg
Compliance

CE

Specifications

Type

elite 13.56 MHz RF Plasma Generators
Frequency

13.56 MHz
Accuracy

±0.005%
Load Impedance Range

200 - 750 W, depending on model
Harmonic Output & Distortion

-20 to -30 dBc
Harmonic Output

-30 dBc
Input AC Power

Single phase, 110VAC - 253VAC, 50Hz / 60Hz
RF Connector

Type N
Remote Digital Interface

RS-232 via DB9F
Analog Interface

25-pin DB25F
Cooling

Air-cooled
Operating Temperature

5 - 40°C
Set Point Response Time

<10ms (analog)

Power Switch

Front Panel Switch
AC Input Connector

IEC Compliant Inlet
LED Indicators

PWR and STAT on rear panel
Watts Nominal into 1.1:1

elite 750: 750 W
elite 600: 600 W
elite 300: 300 W
Watts Nominal into 1.5:1

elite 750: 600 W
elite 600: 600 W
elite 300: 300 W
Watts Nominal into 2:1

elite 750: 486 W
elite 600: 486 W
elite 300: 300 W
Watts Nominal into 3:1

elite 750: 384 W
elite 600: 384 W
elite 300: 300 W
Watts Nominal into inf:1

elite 750: 100 W
elite 600: 200 W
elite 300: 200 W
Rack Size

elite 750 & 600: 2U, full rack
Dimensions

elite 750 & 600: 17 in. W x 15 in. D x 3.5 in. H
Weight

9.2 kg
Compliance

CE

Features

Low Cost of Ownership

Air-cooled for lower facilities cost
High efficiency design, DC to RF efficiency of >85% for low power consumption
Wide input range allows for world wide installation without the need for special transformers

Ease of Installation

Air cooling does not require connection to factory cooling loop
Compact half rack enclosure enables direct tool mounting
Standard IEC input connector eliminates the need for special wiring harnessing
Single phase, wide AC input range allows ease of installation in world wide markets with varying AC line voltages
Fused for operation on single or two phase systems

Exceptional Reliability

Integrated single board design eliminates cables and connectors
Patented inductive-clamp technology protects the generator from the most adverse VSWR load conditions and plasma fluctuations

Increased Value

Field-Programmable Gate Array (FPGA) based control leads to fast control loop and generator protection from load transients
Common Exciter (CEX) allows master slave operation and synchronization with other generators
Optional LCD display and 6-button multifunction key pad allows local operation from the front panel

Features

Low Cost of Ownership

Air-cooled for lower facilities cost
High efficiency design, DC to RF efficiency of >85% for low power consumption
Wide input range allows for world wide installation without the need for special transformers

Ease of Installation

Air cooling does not require connection to factory cooling loop
Compact half rack enclosure enables direct tool mounting
Standard IEC input connector eliminates the need for special wiring harnessing
Single phase, wide AC input range allows ease of installation in world wide markets with varying AC line voltages
Fused for operation on single or two phase systems

Exceptional Reliability

Integrated single board design eliminates cables and connectors
Patented inductive-clamp technology protects the generator from the most adverse VSWR load conditions and plasma fluctuations

Increased Value

Field-Programmable Gate Array (FPGA) based control leads to fast control loop and generator protection from load transients
Common Exciter (CEX) allows master slave operation and synchronization with other generators
Optional LCD display and 6-button multifunction key pad allows local operation from the front panel