622C Baratron® Absolute Capacitance Manometer
(1-1000 Torr) with Terminal Strip Electrical Connector
Direct, Absolute, Analog Pressure/Vacuum Measurement - Ambient Temperature Operation
The Baratron® 622C ambient temperature capacitance manometer is the latest of MKS' analog RoHS-compliant, capacitance-based, high-performance vacuum and pressure transducers. It requires ±15VDC input voltage and provides a high-level 0-10VDC analog output signal that is linear with pressure. This analog output can be interfaced with an MKS pressure controller, an MKS power supply/display instrument, or any instrument that meets these requirements. Changes in pressure/vacuum are determined by measuring the change in capacitance between the sensor's diaphragm and an adjacent electrode disk. This capacitance change is converted to a useable output by patented signal-conditioning electronic circuits. The radially-tensioned Inconel® diaphragm in the sensor provides very fast response (<20 msec in many cases), low hysteresis, excellent repeatability, very high resolution (to 0.001% of Full Scale), exceptionally high corrosion resistance, and double-walled welded construction for operator safety. The sensor itself can withstand repeated exposures to 45 psia (3.1 bar) without permanent degradation or shifting, allowing it to operate in virtually any process system.
The 622C Baratron® capacitance manometer operates at ambient conditions. It is available in Full Scale pressure/vacuum ranges from 0.1 to 1000 Torr (and metric equivalents) and is suited for many industrial, electronic, and research applications. The Type 622C has a terminal block electrical connector.
Features & Benefits:
- Specified in percent of reading for best accuracy and improved process yield
- Direct measurement of chamber total pressure independent of gas type or composition, eliminates lookup tables and conversion factors
- Long-term output stability for state-of-the-art process repeatability
- Inconel® and Incoloy® nickel alloy construction of basic sensor operates without damage in virtually any chemical environment, including halogens, deionized water and steam, and ozone
- High overpressure limit ensures reliability during system mishaps
The 622C is suited for many industrial, electronic, and research applications. The sensor itself can withstand repeated exposures to 45 psia (3.1 bar) without permanent degradation or shifting, allowing it to operate in virtually any process system.
Incoloy® and Iconel® are registered trademarks of Inco Alloys International.
VCR® is a registered trademark of Swagelok® Company.
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