Technical Forum
Ionization Applications, Managing Electrostatic Discharge (ESD), Ionization Products and Services
A knowledge base for electrostatics
The field of electrostatics was traditionally divided into the theoretical study of electrostatics and the practical applications for it, without an emphasis on knowledge exchange. As performance specifications in various industries become increasingly stringent, it is necessary for the two arenas to share insights.
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Technical Publications
ESD Standards
Associations
Application Notes for Novx Products
Technical Publications
Applied Research Technical Publications
Ionization Applications, Managing Electrostatic Discharge (ESD), Ionization Products and Services
Technology Solutions:
Implementing a Static Control Program to Increase the Efficiency of Wet Cleaning Tools
Measuring the PWP of the Handling Component of a Cryogenic Cleaning Tool
Principles of Sheath Technology and Low Maintenance Ionizers
Achieving Full Static Discharge Performance with Synchronization
Ion Delivery Efficiency with Off Time Duty Cycles
Ionization in Practice:
PWP Improvement Using an In-tool Air Ionization System
Improving Particle Contamination Control with In-tool Air Ionization
Solid State Engineering, March, 2007
The Basics of Air Ionization for High-Technology Manufacturing Applications
The Role of Ionization in E78 Compliant Tools
Emitter Points:
Emitter Point Options from Ion
Emitter Point Maintenance
Titanium and Silicon Emitter Point Erosion Analysis
Maintenance:
Realizing Ionizer Balance and Maintenance
Getting the Full Picture from your Charge Plate Monitor
Ionizer Measurement for Critical Static-sensitive Applications
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The Basics
Ionization Applications, Managing Electrostatic Discharge (ESD), Ionization Products and Services
Ionization Glossary:
Terms and definitions for ionization, electrostatic discharge (ESD) science and technology.
Ionization FAQ's:
Frequently asked questions about ionization, electrostatic discharge (ESD) products, services, and technology.
Ionization Basics documents:
The Basics of Air Ionization for High-Technology Manufacturing Applications
The Application of Air Ions
Static Charge Effects and Solutions
Air Ionization Theory and Practices
Biological Aspects of Cleanroom Ionization
Benefits of Ionization
The Role of Ionization in E78 Compliant Tools
Air Ion Distribution Methods: Corona, Alpha, Photoelectric
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ESD Program Management:
Critical Factors in ESD Program Management
Compliance Engineering, September/October 2002
Managing ESD in Leading-Edge Fabs
Electronic News, July 2000
Preventing Electrostatic Problems in Semiconductor Manufacturing
Compliance Engineering, 2004 Annual Reference Guide
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Ionization by Industry
Ionization Applications, Managing Electrostatic Discharge (ESD), Ionization Products and Services
Semiconductor:
Real-World Improvement in Ionization System Performance
Cleanrooms, September, 2007
Improving Particle Contamination Control with In-tool Air Ionization
Solid State Engineering, March, 2007
Investigating FOUPs as a Source of ESD-induced Electromagnetic Interference
Micro, April 2002
Electrostatics Management in Cleanrooms
Cleanrooms Magazine, March 2002
AMD Employs ESD Control for Photomasks
Semiconductor International, June 2001
In 300mm Contamination Control, Watch out for Electrostatic Attraction
Solid State Technology, June 2000
Investigating Static Charge issues in Photolithography Areas
Micro, June 2000
Controlling Electrostatic Attraction of Particles in Production Equipment
Semiconductor International, July 1999
It's The Hardware. No, Software. No, It's ESD
Solid State Technology, May 1999
Investigating a New Generation of ESD-Induced Reticle Defects
Micro, April 1999
Flat Panel Display (FPD):
Electrostatic Damage in TFT and CF Flat Panel Display Manufacturing
Getting the Full Picture from your Charge Plate Monitor
Principles of Sheath Technology and Low Maintenance Ionizers
Air Ionizers in TFT-LCD Manufacturing
Information Display, November 1998
Disk Drive:
Keeping Ahead of Electrostatic Discharge
Data Storage, November 1999
Measurement of the Effects of Ionizer Imbalance and Proximity to Ground in MR Head Handling
Journal of Electrostatics, 1999
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ESD Standards
MKS, Ion carefully follows and promotes industry standards for comprehensive electrostatic charge management. Ion offers a full auditing package for both S20.20 and E78.
Protection of Electrical and Electronic Parts, Assemblies and Equipment
Covers the requirements necessary to design, establish, implement, and maintain an ESD control program to protect electrical or electronic parts, assemblies and equipment susceptible to ESD damage. more
Electrostatic Compatibility - Guide to Assess and Control Electrostatic Discharge (ESD) and Electrostatic Attraction (ESA) for Equipment
Describes how to minimize the negative impact on productivity caused by static charge in semiconductor manufacturing environments. Also describes how to establish electrostatic compatibility of equipment used in semiconductor manufacturing. more
Charged Device Model (CDM)-Component Level
This Standard Test Method establishes the procedures for testing, evaluating, and classifying the ESD sensitivity components to a defined charged device model. more
Guide to Assess and Control Electrostatic Charge in A Semiconductor Manufacturing Facility
Addresses the need for increased control of static electricity and EMI relating to semiconductor devices and reticles. more
Guide for Measuring Static Charge on Objects and Surfaces
Establishes a guide for reproducible measurement of electrostatic charge(s) on any surface or object. more
Electrostatic Charge in Cleanrooms and other Controlled Environments
IEST's Recommended Practice discusses methods for specifying and evaluating the effectiveness of techniques for controlling electrostatic charge. more
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Associations
Cooperation with our fellow industry participants is essential to collectively finding solutions to the most challenging manufacturing and development problems. To regularly address industry issues, Ion Systems' employees devote their time to being part of several major professional organizations.
Converting Equipment Manufacturers Association (CEMA)
Electrostatic Discharge Association (ESD Association)
Silicon Valley EOS/ESD Society
Electrostatic Society of America (ESA)
Institute of Environmental Sciences & Technology (IEST)
International Disk Drive Equipment and Materials Association (IDEMA)
Semiconductor Equipment and Materials International (SEMI)
Semiconductor Industry Suppliers Association (SISA)
Society for Information Display (SID)
StaticPlanet
(Sponsored by 3M Electronic Handling and Protection Division and Partners)
The Association of Industrial Metallizers, Coaters and Laminators (AIMCAL)
The International Society for Optical Engineering (SPIE)
The Technical Association of Paper and Pulp Industries (TAPPI)
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Need help?
Contact an Application Specialist, Sales Services, or Technical Support by sending an email to MKS, Ion Systems or call 800-367-2452 or 510-217-0600.
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