Flow Measurement, Control & Verification

Thermal & Pressure-based Mass Flow Controllers & Meters

In Situ Flow Verifiers

Flow Ratio Controllers

Flow-related Products

Thermal & Pressure-based Mass Flow Controllers for Special Applications

Many process applications use source materials that are liquids or solids or have low vapor pressures at room temperature. Each source material and application will define unique requirements for its measurment and control. Some materials may be delivered at typical ambient temperatures using a low pressure drop device. Others will require heating to develop sufficient vapor pressure for delivery to the process environment. MKS offers a variety of products (both thermal & pressure-based mass flow controllers) designed for the direct control delivery of these materials without the need for a carrier gas.


Products

P2 Low Pressure, Metal-sealed, Multi-gas, Multi-range, Thermal Mass Flow Controller
M330H/AH Metal-sealed Thermal Mass Flow Controllers for High Temperature Applications
1640A Pressure-based Mass Flow Controller Using Sonic Flow for Ambient Temperature Operation up to 50 degrees C
1150C Heated Pressure-based Mass Flow Controller, Using Sonic Flow for High Temperature Operation up to 150 degrees C
1152C Heated Pressure-based Mass Flow Controller, Using Laminar Flow for High Temperature Operation up to 150 degrees C

Literature:

MKS Instruments Flow Measurement & Control Product Line
MKS Mass Flow Control Power Supplies and Readouts data sheet

 

Need help?

Contact an Applications Specialist by sending an email to MKS Flow Measurement & Control, or call 978-645-5500.

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