RF Power Generators
RF Power Supplies with Precise DSP-based Power Control and CE Compliant
MKS, ENI® RF Power Generators provide reliable solid state power for thin films processing equipment. They are vital components of semiconductor fabrication systems, which produce the integrated circuits (ICs) or chips required by modern computers and electronic equipment. ENI RF Generators, combined with our Impedance Matching Network and our V/I Probe form a complete RF Delivery System.
Automatic Frequency Tuning (AFT) is an option
available for MKS RF Plasma Generators. For processes which allow the frequency
to be changed, AFT has the major benefits of both speed and reliability by eliminating the
movable tuning elements found in traditional matching networks.
Learn more about Automatic Frequency Tuning
MKS also offers reconditioned equipment for sale at considerable savings.
Contact MKS ENI Products for more information.