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13.56MHz RF Plasma Generators


13.56MHz is the frequency most commonly used for plasma processes. MKS RF plasma generators are the most advanced class of 13.56 MHz generators commercially available. These RF generators are designed for all 13.56MHz applications including, PECVD, HDPCVD, PVD, ALD, etch and strip for the manufacture of integrated circuits, solar cells, flat panel displays, LEDs and data storage devices.

Features Include:

  • Frequency Stability of ±0.005%
  • Unlimited load impedance range
  • Excellent reliability
ModelRated Power OutputAccuracyFrequency
Stability
dLoad
Impedance
Range
Automatic
Frequency
Tuning
SurePower® QL13013130-13,000W±1%13.56 MHz
±0.005%
Unlimited±5% Bandwidth
(optional)
SurePower® QL10513105-10,500W±1%
SurePower® QL651365-6,500W±1%
SurePower® QL551355-5,500W±1%
SurePower® QL351335-3,500W±1%
GHW-5010-5,000W ±1.5%
GHW-2510-2,500W±1.5%
GHW-1210-1,250W±1.5%
elite 7501-100W
101-750W
2W
±2%
elite 6001-100W
101-600W
2W
±2%
elite 3001-100W
101-300W
2W
±2%

Products

SurePower® Series 13.56 MHz ,3.5 to 13kW RF Plasma Generators
GHW Series 13.56 MHz, 1.25, 2.5, and 5.0 kW, High-Reliability RF Plasma Generators
eliteâ„¢ Series 750, 600, & 300 Watt, 13.56 MHz, RF Plasma Generators

 

Need help?

Contact an Applications Specialist by sending an email to MKS, ENI Products or call 585-427-8300.

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