DC Power Generators
DC Power Supplies and DC Power Generators

MKS designs and develops both pulsed and continuous DC power generators with superior arc control circuitry and 0.01% repeatability for improved process yield in thin film applications.

RPG (Reactive Plasma Generators) provide asymmetric bipolar and unipolar pulsed DC power for reactive PVD (Physical Vapor Deposition), CVD (Chemical Vapor Deposition) bias and enhancement coating applications. The RPG line eliminates yield-limiting factors, thus enabling existing PVD tools to produce the high quality, low-defect films needed for next generation processes.