Residual Gas Analysis/Mass Spectrometry

Residual Gas Analyzers (RGA)

RGA Vacuum Process Monitors

RGA Process and Chamber Environment Hardware and Software Monitors

Atmospheric Pressure Residual Gas Analyzers

Software for RGA, Process, and Chamber Monitoring

Related Products: FTIR/NDIR Gas Analysis

Cirrus™2 Atmospheric Pressure Residual Gas Analyzers

photo - Cirrus2 Benchtop Atmospheric RGA System

Cirrus™2 quadrupole mass spectrometer offers the versatility of state-of-the-art quadrupole mass spectrometry in a convenient bench-top configuration. Cirrus quadrupole mass spectrometer systems are regularly used for the identification and analysis of gases and gas mixtures in a wide variety of applications.


Products

Cirrus™2 Benchtop Atmospheric RGA System
Cirrus™2 Benchtop Atmospheric RGA System with Multi-stream Inlet
Cirrus™2 Benchtop Atmospheric RGA System with Integrated Optical Sensor for Carbon Monoxide (CO)

Literature:

Cirrus™2 data sheet
Cirrus™2 specifications
Cirrus™2 dimensional drawing
Multi-Inlet Cirrus™ to Monitor Hydrogen Reduction Process
General Overview of Cirrus™ in Catalysis and Fuel Cell Applications
Integration Maximizes Returns on Investment
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Need help?

Contact an RGA Application Specialist by sending an email to MKS Instruments, Spectra Products or call 408-750-0300.

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