Compact, General Purpose Thermal Mass Flow Controllers
The MF1's compact size (less than 4 inches high, 3 inches long, 1 inches wide) provides an option where available space is limited such as in many analytical and sputter applications. While small in stature, the elastomer-sealed MF1 offers excellent accuracy and repeatability.
- Elastomer-sealed MFC
- Full scale flow rates from 10 sccm to 20 slm
- Multi-gas/multi-range MFC
- Digital and analog I/O
Learn more about the MF1 Mass Flow Controllers & Meters here