Flow Measurement, Control & Verification

Thermal & Pressure-based Mass Flow Controllers & Meters

In Situ Flow Verifiers

Flow Ratio Controllers

Flow-related Products

Thermal & Pressure-based Mass Flow Controllers & Meters
Mass Flow Controller & Mass Flow Meter Products from MKS Instruments

photo - P2A Metal sealed MFC for low pressure drop operating conditions such as ion implant source gases

Thermal & Pressure-based Mass Flow Controllers for Special Applications

Certain process vapors and gases require mass flow controllers of a special design specific to the material as well as process conditions. MKS offers both thermal mass flow controllers and pressure based mass flow controllers for these applications that require flow control at elevated temperatures and/or low pressure drop conditions given the source material charactertics.

photo - 1179A General Purpose, Elastomer-sealed Mass Flow Controller

Legacy Mass Flow Controllers & Meters

While MKS continues to enhance its Mass Flow Control product line with new models such as those above, there are many more mass flow controller models MKS has provided over the years. MKS continues to offer and provide support for its loyal customer base for these MFCs.


Categories

G-Series Thermal Mass Flow Controllers and Meters with Fast & Repeatable Performance
I-Series IP66-rated Thermal Mass Flow Controllers & Meters
P-Series High Performance Multi-gas, Multi-range Thermal Mass Flow Controllers
High-flow Thermal Mass Flow Controllers & Meters
Compact, General Purpose Thermal Mass Flow Controllers
Thermal & Pressure-based Mass Flow Controllers for Special Applications
Legacy Mass Flow Controllers & Meters

Literature:

MKS Instruments Flow Measurement & Control Product Line
MKS Mass Flow Control Power Supplies & Readouts data sheet
Model-Based Solution for Multigas Mass Flow Control with Pressure Insensitivity
Critical Evaluation of Thermal Mass Flow Meters
Pressure Based Mass Flow Control for Ion Implant SDS Applications
Gas Correction Factors for Thermal-based Mass Flow Controllers
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Need help?

Contact an Applications Specialist by sending an email to MKS Flow Measurement & Control, or call 978-645-5500.

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