Mass Flow Controllers & Mass Flow Meters
Mass Flow Control Products from MKS Instruments
Enabling our customers to bring their products and processes to market faster, more reliably, and more cost effectively is at the heart of our mass flow controller (MFC) design philosophy. The MKS family of mass flow controllers and mass flow meters measure and control the flow of critical gases in a wide variety of applications, such as semiconductor manufacturing, optical coatings and flat panel display manufacturing. With features, functionality and performances to meet virtually any need, customers can expect reduced cost of ownership and better tool and process performance.
Mass Flow Controllers (MFCs) and Mass Flow Meters (MFMs) from MKS Instruments are available with either analog or digital communication, and with elastomer or metal seals. Analog mass flow controllers and mass flow meters are ideal for basic applications, offering high performance in a simple and cost effective package. Digital mass flow controllers and mass flow meters offer several advantages over analog mass flow controllers and mass flow meters - improved diagnostic capabilities, multi-gas capability in a single package and multi-range capability for reduced spares requirement and overall lower cost of ownership.