Mass Spectrometry/Residual Gas Analysis

Residual Gas Analyzers (RGA)

RGA Vacuum Process Monitors

RGA Process and Chamber Environment Hardware and Software Monitors

Atmospheric Pressure Residual Gas Analyzers

Software for RGA, Process, and Chamber Monitoring

Related Products: FTIR/NDIR Gas Analysis

Residual Gas Analyzers (RGA)
Quadrupole Mass Spectrometer, Residual Gas Analysis, Process Monitor, & Process Control Products

photo - Microvision 2 Flexible, Integration-ready Residual Gas Analyzer (RGA)

For general residual gas analysis, the performance of MicroVision2 residual gas analyzer, coupled to the wide range of configurations available, make it the ideal choice for many different residual gas analyzer applications, including ultra high vacuum (UHV), such as vacuum coatings, accelerators and high energy physics, harsh environments, such as high temperature and ionizing radiation, high performance, research and development for high mass species studies, and high resolution studies, including low molecular weight species studies and helium from Deuterium studies.

photo - e-Vision 2 General Purpose Residual Gas Analyzer (RGA)

The web-enabled e-Vision 2 residual gas analyzer represents a significant advance in Residual Gas Analysis (RGA) technology, opening up new possibilities for vacuum monitoring and e-diagnostics. With an unprecedented range of instrument control options, e-Vision 2 residual gas analyzer is designed to make vacuum troubleshooting and monitoring of chamber residual gases straightforward.

Products

Microvision 2 Flexible, Integration-ready Residual Gas Analyzer (RGA)

e-Vision 2 General Purpose Residual Gas Analyzer (RGA)

HPQ2 High Pressure RGA (<1 mTorr)

HPQ2S High Pressure RGAs (<8 mTorr)

HPQ IP web-enabled High Pressure RGA (<1 mTorr)

HPQS IP web-enabled High Pressure RGA (<8 mTorr)

Documents

RGA's - More than Just Leak Detectors

Microvision 2 data sheet

e-Vision 2 data sheet

HPQ2/HPQ2S data sheet

Spectra RGA Application Bulletin # 208 - Spectra reference

Spectra RGA Application Bulletin # 209 - Naturally Occuring Isotopes

Increased Electron Multiplier Lifetimes Through Intelligent Data Acquisition

Chamber Pumpdown Studies

Spectra Analyzer Care and Repair

RGA Literature archive (literature for older RGA products)
 

Need help?

Contact an RGA Application Specialist by sending an email to MKS Instruments, Spectra Products or call 408-750-0300.

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