Pressure/Vacuum Measurement

Baratron® Direct (Gas Independent) Pressure/Vacuum Capacitance Manometers (0.01-155,000 Torr)

Vacuum Transducers, Gauges, Sensors and Controllers (1x10-11 to 1500 Torr)

Pressure/Vacuum Switches

Digital Communications
(Direct, Absolute Pressure/Vacuum Measurement)

628C e-Baratron Ethernet-Enabled Capacitance Manometer

The e-Baratron®, Ethernet-Enabled Baratron®, and i-Baratron® DMA Digital Capacitance Manometers are the first in a family of pressure manometers that are digital from the ground up, making them truly "intelligent".

Standard analog pressure manometers contain electronics producing a 0-10VDC output proportional to a change in pressure from 0-100% of full scale range. The e-Baratron® and i-Baratron® digital electronics produce digital values of pressure proportional to changes over 0-100% of full scale range. This data can be placed directly on the tool network without passing through I/O and A/D channels. Many semiconductor tool platforms are configured with DeviceNet™.

Digital process manometers also incorporate a separate connector with analog equivalent output. This can be used for downstream pressure control where traditional electronics require analog input.

Categories

Ambient Temperature Operation (Direct, Absolute, Digital Pressure/Vacuum Measurement)

Temperature Controlled to 45 degrees C (Direct, Absolute, Digital Pressure/Vacuum Measurement)

Temperature Controlled to 80 or 100 degrees C (Direct, Absolute, Digital Pressure/Vacuum Measuremen

Documents

Pressure Measurement & Control Product Line

DeviceNet FAQ's

Baratron® Pressure Measurement Selection Guide

The Effect of Aggressive Gases on Capacitance Manometers

Advances in Capacitance Manometers for Pressure Measurement

Baratron® Etch Manometer Reduces Zero Drift

Intelligent Sensors Improve Process Control

Pressure Measurement and Control Keep Pace with Processing

Vacuum Pressure Measurement
 

Need help?

Contact an Applications Specialist by sending an email to MKS Instruments, or call 978-645-5500.

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