13.56MHz RF Plasma Generators

13.56MHz is the frequency most commonly used for plasma processes. MKS RF plasma generators are the most advanced class of 13.56 MHz generators commercially available. These RF generators are designed for all 13.56MHz applications including, PECVD, HDPCVD, PVD, ALD, etch and strip for the manufacture of integrated circuits, solar cells, flat panel displays, and data storage devices.

Features Include:

Higher power levels than competitive offerings
Frequency Stability of ±0.005%
Unlimited load impedance range
Excellent reliability

Model	Rated Power Output	Accuracy	Frequency Stability	dLoad Impedance Range	Automatic Frequency Tuning
SurePower® QL13013	130-13,000W	±1%	13.56 MHz ±0.005%	Unlimited	±5% Bandwidth (optional)
SurePower® QL10513	105-10,500W	±1%
SurePower® QL6513	65-6,500W	±1%
SurePower® QL5513	55-5,500W	±1%
SurePower® QL3513	35-3,500W	±1%
Spectrum® 3013	30-3,000W	±1%
GHW-50	10-5,000W	±1.5%
GHW-25	10-2,500W	±1.5%
GHW-12	10-1,250W	±1.5%