MKS introduces the High Cycle Valve

A compact valve designed for long life in demanding applications.

Andover, MA, July 14, 2010 - MKS Instruments, Inc. (NASDAQ: MKSI), a global provider of technologies that enable advanced processes and improve productivity, has introduced the High Cycle Valve, a small, light and durable vacuum valve for demanding applications where the cycle life is critical. Rated for 10,000,000 cycles, the compact valve greatly increases system uptime and minimizes maintenance costs. A new formed stainless steel bellows prevents outgassing, virtual leaks and particle entrapment, ensuring easy maintenance and extending the cycle life of the valve.

The High Cycle Valve is available in angle, inline and internal-only configurations, for ease of integration into new tool designs. High flow port sizes, including NW25, NW40 and NW50, use maximum internal diameters for greater conductance. Internal configurations can be used to integrate directly into the product, such as a load lock chamber, reducing the footprint of new tools. The TIG fusion welded vacuum grade body creates fewer entrapment areas, resulting in less contamination build-up.

The High Cycle Valve is available with an air solenoid for electro-pneumatic control of the valve and a limit switch assembly for remote indication in the open or closed position. In the event of power loss, the valve will automatically close. For leak tight operation, elastomer seals are available in Viton® for typical vacuum operating conditions, or Kalrez® or Chemraz® for higher temperature conditions and increased chemical resistance.

Note to editors: Download a photo of High Cycle Valves, please go to the MKS web site: www.mksinst.com/photos.

For more information:

Learn more about the HCV Valve

Email MKS Instruments, HPS® Products, or call 303-449-9861.

About MKS:

MKS Instruments, Inc. is a leading, global provider of technologies to power, control, deliver, monitor, measure and analyze advanced processes in high growth markets. Our primary served markets are manufacturers of capital equipment for thin film applications including semiconductor devices, flat panel displays, light emitting diodes (LEDs), solar cells, data storage media and coatings, as well as medical equipment; energy generation and environmental monitoring processes; biopharm and other industrial manufacturing; and university, government and industrial research laboratories.