MKS Solutions

Control Systems

Data Collection & Analysis

Flanges, Fittings, & Ferrules

FTIR/NDIR Gas Analyzers

Gas & Vapor Delivery

Heater Jackets for Stainless Steel Vacuum Products

Leak Detection

Mass Spectrometry/Residual Gas Analysis

Plasma Sources

Pressure/Vacuum Measurement

RF & DC Power

Valves

Solar & Energy

The solar and energy markets for MKS include equipment to manufacture emerging technologies such as photovoltaic solar cells and fuel cells, as well as traditional energy markets such as power plants, natural gas, petroleum and other established energy sources.

In the Solar segment, both silicon and thin film solar cells require deposition of thin films under vacuum. Film quality, process uniformity, productivity and yield are essential to solar cell production. Other energy markets require precise material delivery with excellent process control and analysis for high yield and productivity.

MKS Instruments, Inc. has a broad portfolio of products to support Solar as well as other energy markets. These include high frequency, power sources for fast, high quality film deposition, remote plasma sources for high speed, efficient chamber cleaning, gas pressure measurement and control, materials delivery, gas composition analysis, data management and analysis, yield improvement software and vacuum technology.

Applications Information:

Products for Solar Industries from MKS Instruments

The Use of the Series 959 Hot Ion Gauge Controller with Continuous I2R Degas for CIGS PV Processing

Vision 1000-E™ for Process Monitoring on Large Area Coating Tools

Critical Reactive Sputtering Process Control with the HPQS-IP Residual Gas Analyzer

MKS FTIR Analysis for Syngas Reactions

FTIR Analysis for Reforming of Hydrocarbons

Infrared Analysis of E85 Engines

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