Flat Panel Display
Flat Panel Displays are found in computer monitors, televisions, cell phones, PDAs, digital cameras and other electronics. Flat Panel Display manufacturing requires vacuum deposition and etching of multiple layers of precisely controlled thin films, often over large area substrates.
Uniformity, cleanliness, productivity and control are key to flat panel display manufacturing.
MKS Instruments, Inc. has a broad portfolio of products to support the flat panel display equipment market. These include remote plasma sources for high speed, efficient chamber cleaning, high frequency, power sources for fast, high quality film deposition, gas pressure measurement and control, materials delivery, gas composition analysis, electrostatic discharge monitoring and control, data management and analysis, yield improvement software and vacuum technology.
Applications Information:
See how MKS surrounds the FPD making process.
Advances in Remote Plasma Sources for Cleaning 300mm and Flat Panel CVD Systems
Air Ionizers in TFT-LCD Manufacturing
Electrostatic Damage in TFT and CF Flat Panel Display Manufacturing
EMI/ESD Pulse Ionizer Interference Issues
Getting the Full Picture from your Charge Plate Monitor
NanoPulse ESD/EMI/RFI Sensor - Separating ESD from all the Rest
Principles of Sheath Technology and Low Maintenance Ionizers
Special Techniques for Detecting ESD Events in EMS Manufacturing Facilities - Finding ESD in Production Lines
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