MKS Solutions

Control Systems

Custom Vacuum Fabrication

Data Collection & Analysis

Flow Measurement, Control & Verification

FTIR/NDIR Gas Analyzers

Gas & Vapor Delivery

Heater Jackets for Stainless Steel Vacuum Products

Ionization, Static Control, Voltage Detection & Process Environment Monitoring

Leak Detection

Mass Spectrometry/Residual Gas Analysis

Ozone Products

Plasma Sources

Pressure/Vacuum Control

Pressure/Vacuum Measurement

RF & DC Power

Traps & Effluent Management

Stainless Steel Fittings

Valves

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See how MKS surrounds the FPD process with this interactive process diagram.

Flat Panel Display

Flat Panel Displays are found in computer monitors, televisions, cell phones, PDAs, digital cameras and other electronics. Flat Panel Display manufacturing requires vacuum deposition and etching of multiple layers of precisely controlled thin films, often over large area substrates.

Uniformity, cleanliness, productivity and control are key to flat panel display manufacturing.

MKS Instruments, Inc. has a broad portfolio of products to support the flat panel display equipment market. These include remote plasma sources for high speed, efficient chamber cleaning, high frequency, power sources for fast, high quality film deposition, gas pressure measurement and control, materials delivery, gas composition analysis, electrostatic discharge monitoring and control, data management and analysis, yield improvement software and vacuum technology.

Applications Information:

See how MKS surrounds the FPD making process.

Advances in Remote Plasma Sources for Cleaning 300mm and Flat Panel CVD Systems

Air Ionizers in TFT-LCD Manufacturing

Electrostatic Damage in TFT and CF Flat Panel Display Manufacturing

EMI/ESD Pulse Ionizer Interference Issues

Getting the Full Picture from your Charge Plate Monitor

NanoPulse ESD/EMI/RFI Sensor - Separating ESD from all the Rest

Principles of Sheath Technology and Low Maintenance Ionizers

Special Techniques for Detecting ESD Events in EMS Manufacturing Facilities - Finding ESD in Production Lines

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