Flat Panel Display
Flat Panel Displays are found in computer monitors, televisions, cell phones, PDAs, digital cameras and other electronics. Flat Panel Display manufacturing requires vacuum deposition and etching of multiple layers of precisely controlled thin films, often over large area substrates.
Uniformity, cleanliness, productivity and control are key to flat panel display manufacturing.
MKS Instruments, Inc. has a broad portfolio of products to support the flat panel display equipment market. These include remote plasma sources for high speed, efficient chamber cleaning, high frequency, power sources for fast, high quality film deposition, gas pressure measurement and control, materials delivery, gas composition analysis, data management and analysis, yield improvement software and vacuum technology.
Applications Information:
Advances in Remote Plasma Sources for Cleaning 300mm and Flat Panel CVD Systems
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